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低成本、高性能喷雾热解生长的非晶态锌锡氧化物:复杂生长过程的挑战

Low-Cost, High-Performance Spray Pyrolysis-Grown Amorphous Zinc Tin Oxide: The Challenge of a Complex Growth Process.

作者信息

Zhussupbekova Ainur, Caffrey David, Zhussupbekov Kuanysh, Smith Christopher M, Shvets Igor V, Fleischer Karsten

机构信息

School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2, Ireland.

School of Physics, Dublin City University, Dublin 9, Ireland.

出版信息

ACS Appl Mater Interfaces. 2020 Oct 14;12(41):46892-46899. doi: 10.1021/acsami.0c12148. Epub 2020 Oct 2.

DOI:10.1021/acsami.0c12148
PMID:32955846
Abstract

Transparent conductive oxides (TCOs) are important materials for a wide range of optoelectronic devices. Amorphous zinc tin oxide (a-ZTO) is a TCO and one of the best nontoxic, low-cost replacements for more expensive amorphous indium-gallium-zinc oxide. Here, we employ spray pyrolysis (SP), an inexpensive and versatile chemical vapor deposition-based technique, to synthesize a-ZTO with an as-deposited conductivity of ≈300 S/cm-the highest value hitherto among the reported solution-processed films. Compositional analysis via X-ray photoelectron spectroscopy reveals a nonstoichiometric transfer of Zn and Sn from the dissolved precursors into the film, with the best electrical properties achieved at a film composition of = 0.38 ± 0.04 ((ZnO)(SnO) (0 < < 1)). The morphology of these films is compared to films synthesized by physical vapor deposition (PVD), and a strong correlation between morphology and electrical properties is revealed. The granular nature of the SP-grown films, which seems like a drawback at first glance, brings about the prospect of using a-ZTO in ink-jet-printed films from a nanoparticle suspension for the room-temperature deposition. Brief post-anneal cycles in N gas improve the conductivity of the films by means of grain boundary (GB) passivation.

摘要

透明导电氧化物(TCOs)是广泛应用于各种光电器件的重要材料。非晶态锌锡氧化物(a-ZTO)是一种TCO,是替代更昂贵的非晶态铟镓锌氧化物的最佳无毒、低成本材料之一。在此,我们采用喷雾热解(SP),一种基于化学气相沉积的廉价且通用的技术,来合成a-ZTO,其沉积态电导率约为300 S/cm,这是迄今报道的溶液处理薄膜中的最高值。通过X射线光电子能谱进行的成分分析表明,锌和锡从溶解的前驱体非化学计量地转移到薄膜中,在薄膜成分x = 0.38 ± 0.04((ZnO)x(SnO)1 - x,0 < x < 1)时获得最佳电学性能。将这些薄膜的形态与通过物理气相沉积(PVD)合成的薄膜进行比较,揭示了形态与电学性能之间的强相关性。SP生长薄膜的颗粒性质乍一看似乎是一个缺点,但它为在室温下从纳米颗粒悬浮液喷墨打印的薄膜中使用a-ZTO带来了前景。在氮气中进行简短的后退火循环通过晶界(GB)钝化提高了薄膜的电导率。

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