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具有-1800应变片系数的硼掺杂碳化硅纳米带中的巨压阻效应。

Giant Piezoresistance in B-Doped SiC Nanobelts with a Gauge Factor of -1800.

作者信息

Li Xiaoxiao, Gao Fengmei, Wang Lin, Chen Shanliang, Deng Bei, Chen Lang, Lin Chun-Ho, Yang Weiyou, Wu Tom

机构信息

Institute of Materials, Ningbo University of Technology, Ningbo City 315211, P.R. China.

School of Material Science and Engineering, Shandong University, Jinan 250061, P.R. China.

出版信息

ACS Appl Mater Interfaces. 2020 Oct 21;12(42):47848-47853. doi: 10.1021/acsami.0c13800. Epub 2020 Oct 8.

Abstract

The giant piezoresistance effect (PRE) of semiconductors as featured by a high gauge factor (GF) is recognized as the prerequisite for realizing optimal pressure sensors with desired high sensitivity. In this work, we report the discovery of giant PRE in SiC nanobelts with a record GF measured using an atomic force microscope. The transverse piezoresistance coefficient along the [111] direction reaches as high as -312.51 × 10 pa with a corresponding GF up to -1875.1, which is twice more than the highest value ever reported on SiC nanomaterials. The first-principles calculations reveal that B doping turns the acceptor states in the bandgap into deeper impurity levels, which makes the major contribution to the observed giant piezoresistance behavior. Our result provides new insights on designing pressure sensors based on SiC nanomaterials.

摘要

具有高应变片系数(GF)的半导体巨压阻效应(PRE)被认为是实现具有所需高灵敏度的最佳压力传感器的先决条件。在这项工作中,我们报告了在碳化硅纳米带中发现的巨PRE,其使用原子力显微镜测量的GF创纪录。沿[111]方向的横向压阻系数高达-312.51×10帕,相应的GF高达-1875.1,这比碳化硅纳米材料上报道的最高值高出两倍。第一性原理计算表明,硼掺杂将带隙中的受主态转变为更深的杂质能级,这对观察到的巨压阻行为起主要作用。我们的结果为基于碳化硅纳米材料设计压力传感器提供了新的见解。

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