基于针尖的纳米加工的分子动力学研究综述

Molecular Dynamics Study on Tip-Based Nanomachining: A Review.

作者信息

Li Zihan, Yan Yongda, Wang Jiqiang, Geng Yanquan

机构信息

Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People's Republic of China.

The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, 150080, Heilongjiang, People's Republic of China.

出版信息

Nanoscale Res Lett. 2020 Oct 15;15(1):201. doi: 10.1186/s11671-020-03419-5.

DOI:10.1186/s11671-020-03419-5

PMID:33063205

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7561650/

Abstract

Tip-based nanomachining (TBN) approaches has proven to be a powerful and feasible technique for fabrication of microstructures. The molecular dynamics (MD) simulation has been widely applied in TBN approach to explore the mechanism which could not be fully revealed by experiments. This paper reviews the recent scientific progress in MD simulation of TBN approach. The establishing methods of the simulation model for various materials are first presented. Then, the analysis of the machining mechanism for TBN approach is discussed, including cutting force analysis, the analysis of material removal, and the defects analysis in subsurface. Finally, current shortcomings and future prospects of the TBN method in MD simulations are given. It is hopeful that this review can provide certain reference for the follow-up research.

摘要

基于针尖的纳米加工（TBN）方法已被证明是一种用于制造微结构的强大且可行的技术。分子动力学（MD）模拟已广泛应用于TBN方法中，以探索那些实验无法完全揭示的机制。本文综述了TBN方法MD模拟的最新科学进展。首先介绍了各种材料模拟模型的建立方法。然后，讨论了TBN方法的加工机制分析，包括切削力分析、材料去除分析和亚表面缺陷分析。最后，给出了TBN方法在MD模拟中的当前不足和未来前景。希望这篇综述能为后续研究提供一定的参考。