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通过使用贝塞尔光束进行体积划线和背面加工,对传统玻璃切割技术与基于激光的方法进行深入比较。

In-depth comparison of conventional glass cutting technologies with laser-based methods by volumetric scribing using Bessel beam and rear-side machining.

作者信息

Dudutis Juozas, Pipiras Jokūbas, Stonys Rokas, Daknys Eimantas, Kilikevičius Artūras, Kasparaitis Albinas, Račiukaitis Gediminas, Gečys Paulius

出版信息

Opt Express. 2020 Oct 12;28(21):32133-32151. doi: 10.1364/OE.402567.

DOI:10.1364/OE.402567
PMID:33115177
Abstract

With the development of industrial lasers and novel glass processing techniques, which offer high speed, quality and precision, this becomes an attractive alternative to conventional methods, such as mechanical scribing and cleaving, diamond saw and waterjet cutting, commonly used in the industry. However, the emerging techniques lack thorough validation with respect to well-established methods. To this end, we present a detailed comparison of different glass cutting methods, taking into account surface quality, side-wall roughness, residual stresses and flexural strength. In addition, samples were examined after fracture, and the flexural strength was estimated according to the quarter elliptical corner flaws, which were the main reason of glass failure. Two laser glass processing techniques were investigated - the rear-side glass processing with tightly focused nanosecond laser pulses and sub-nanosecond laser volumetric scribing with asymmetrical Bessel beam. Results were compared to mechanical scribing and breaking, diamond saw and waterjet cutting.

摘要

随着工业激光器和新型玻璃加工技术的发展,这些技术具备高速、高质量和高精度的特点,这使其成为行业中常用的传统方法(如机械划线与切割、金刚石锯切和水刀切割)颇具吸引力的替代方案。然而,这些新兴技术相对于成熟方法而言缺乏全面的验证。为此,我们对不同的玻璃切割方法进行了详细比较,同时考虑了表面质量、侧壁粗糙度、残余应力和抗弯强度。此外,在断裂后对样品进行了检查,并根据四分之一椭圆角缺陷估算了抗弯强度,这些缺陷是玻璃失效的主要原因。研究了两种激光玻璃加工技术——使用紧聚焦纳秒激光脉冲的背面玻璃加工以及使用非对称贝塞尔光束的亚纳秒激光体刻划。将结果与机械划线与破碎、金刚石锯切和水刀切割的结果进行了比较。

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