Balage Pierre, Guilberteau Théo, Lafargue Manon, Bonamis Guillaume, Hönninger Clemens, Lopez John, Manek-Hönninger Inka
Université de Bordeaux-CNRS-CEA, CELIA UMR 5107, 33405 Talence, France.
AMPLITUDE, Cité de la Photonique, 33600 Pessac, France.
Micromachines (Basel). 2023 Aug 22;14(9):1650. doi: 10.3390/mi14091650.
We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 mm thickness with an excellent cutting quality. Moreover, we present a comparison of the cutting results with the state-of-the-art method, consisting of short MHz-bursts of femtosecond pulses. We further illustrate the influence of the laser beam parameters such as the burst energy and the pitch between consecutive Bessel beams on the machining quality of the cutting plane and provide process windows for both regimes.
据我们所知,我们首次报道了在千兆赫脉冲串模式下用飞秒激光进行贝塞尔光束电介质切割。非衍射光束整形基于使用轴棱锥,能够切割厚度达1毫米的玻璃,且切割质量优异。此外,我们将切割结果与最先进的方法进行了比较,该方法由飞秒脉冲的短兆赫脉冲串组成。我们还阐述了诸如脉冲串能量和连续贝塞尔光束之间的间距等激光束参数对切割平面加工质量的影响,并为两种模式提供了工艺窗口。