一种在正向和反向运动中具有高度一致性的摩擦电式压电致动器。

A stick-slip piezoelectric actuator with high consistency in forward and reverse motions.

作者信息

Xu Zhi, Li Xuan, Wang Kuifeng, Liang Tianwei, Dong Jingshi, Huang Hu

机构信息

Key Laboratory of CNC Equipment Reliability, Ministry of Education, School of Mechanical and Aerospace Engineering, Jilin University, Changchun, Jilin 130022, China.

出版信息

Rev Sci Instrum. 2020 Oct 1;91(10):105005. doi: 10.1063/5.0025977.

DOI:10.1063/5.0025977

PMID:33138615

Abstract

This paper presents a stick-slip piezoelectric actuator with high consistency in performances of forward and reverse motions. It is achieved by developing an integrated stator which bonds two lead zirconate titanate ceramic plates to a symmetrical flexible hinge mechanism. The working principle of the actuator was introduced, and the stator was optimized by finite-element analysis. Experimental results showed that the proposed actuator had an excellent consistency in output performances of forward and reverse motions with or without an external load. The positioning resolution, maximum speed, and maximum loading capacity of the actuator were 0.061 µm, 2195.29 µm/s, and 1.1 N, respectively. This study provides a solution for improving the forward and reverse motion consistency of stick-slip piezoelectric actuators.

摘要

本文提出了一种在正反运动性能上具有高度一致性的粘滑型压电致动器。它是通过开发一种集成定子来实现的，该定子将两块锆钛酸铅陶瓷板粘结到一个对称的柔性铰链机构上。介绍了该致动器的工作原理，并通过有限元分析对定子进行了优化。实验结果表明，所提出的致动器在有无外部负载的情况下，正反运动的输出性能都具有出色的一致性。该致动器的定位分辨率、最大速度和最大负载能力分别为0.061 µm、2195.29 µm/s和1.1 N。本研究为提高粘滑型压电致动器的正反运动一致性提供了一种解决方案。