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基于氧化铪的忆阻系统中顶部电极材料对高掺杂硅的影响。

Effects of top electrode material in hafnium-oxide-based memristive systems on highly-doped Si.

作者信息

Saylan Sueda, Aldosari Haila M, Humood Khaled, Abi Jaoude Maguy, Ravaux Florent, Mohammad Baker

机构信息

System on Chip Center (SoCC), Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, United Arab Emirates.

Department of Electrical Engineering and Computer Science, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, United Arab Emirates.

出版信息

Sci Rep. 2020 Nov 11;10(1):19541. doi: 10.1038/s41598-020-76333-6.

Abstract

This work provides useful insights into the development of HfO-based memristive systems with a p-type silicon bottom electrode that are compatible with the complementary metal-oxide-semiconductor technology. The results obtained reveal the importance of the top electrode selection to achieve unique device characteristics. The Ag/HfO/Si devices have exhibited a larger memory window and self-compliance characteristics. On the other hand, the Au/HfO/Si devices have displayed substantial cycle-to-cycle variation in the ON-state conductance. These device characteristics can be used as an indicator for the design of resistive-switching devices in various scenes such as, memory, security, and sensing. The current-voltage (I-V) characteristics of Ag/HfO/Si and Au/HfO/Si devices under positive and negative bias conditions have provided valuable information on the ON and OFF states of the devices and the underlying resistive switching mechanisms. Repeatable, low-power, and forming-free bipolar resistive switching is obtained with both device structures, with the Au/HfO/Si devices displaying a poorer device-to-device reproducibility. Furthermore, the Au/HfO/Si devices have exhibited N-type negative differential resistance (NDR), suggesting Joule-heating activated migration of oxygen vacancies to be responsible for the SET process in the unstable unipolar mode.

摘要

这项工作为基于HfO的忆阻系统的发展提供了有用的见解,该系统具有与互补金属氧化物半导体技术兼容的p型硅底部电极。所获得的结果揭示了选择顶部电极对于实现独特器件特性的重要性。Ag/HfO/Si器件表现出更大的记忆窗口和自顺应特性。另一方面,Au/HfO/Si器件在导通状态电导方面表现出显著的逐周期变化。这些器件特性可作为各种场景(如存储器、安全和传感)中电阻开关器件设计的指标。Ag/HfO/Si和Au/HfO/Si器件在正负偏置条件下的电流-电压(I-V)特性提供了有关器件导通和关断状态以及潜在电阻开关机制的有价值信息。两种器件结构均实现了可重复、低功耗且无需形成过程的双极电阻开关,其中Au/HfO/Si器件的器件间再现性较差。此外,Au/HfO/Si器件表现出N型负微分电阻(NDR),这表明焦耳热激活的氧空位迁移是不稳定单极模式下SET过程的原因。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff41/7658356/cdc15cafed8e/41598_2020_76333_Fig1_HTML.jpg

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