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通过溶胶-凝胶旋涂法制备的双极型铜/氧化铪/ p型硅忆阻器及其在环境传感中的应用

Bipolar Cu/HfO/p Si Memristors by Sol-Gel Spin Coating Method and Their Application to Environmental Sensing.

作者信息

Abdul Hadi Sabina, Humood Khaled M, Abi Jaoude Maguy, Abunahla Heba, Shehhi Hamda Faisal Al, Mohammad Baker

机构信息

Department of Electrical and Computer Engineering, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi, UAE.

Currently working at College of Engineering and IT, University of Dubai, P.O. Box 14143, Dubai, UAE.

出版信息

Sci Rep. 2019 Jul 10;9(1):9983. doi: 10.1038/s41598-019-46443-x.

DOI:10.1038/s41598-019-46443-x
PMID:31292515
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6620357/
Abstract

In this paper, the memristive switching behavior of Cu/ HfO/p Si devices fabricated by an organic-polymer-assisted sol-gel spin-coating method, coupled with post-annealing and shadow-mask metal sputtering steps, is examined. HfO layers of about 190 nm and 80 nm, are established using cost-effective spin-coating method, at deposition speeds of 2000 and 4000 rotations per minute (RPM), respectively. For two types of devices, the memristive characteristics (V, I, and V) and device-to-device electrical repeatability are primarily discussed in correlation with the oxide layer uniformity and thickness. The devices presented in this work exhibit an electroforming free and bipolar memory-resistive switching behavior that is typical of an Electrochemical Metallization (ECM) I-V fingerprint. The sample devices deposited at 4000 RPM generally show less variation in electrical performance parameters compared to those prepared at halved spin-coating speed. Typically, the samples prepared at 4000 RPM (n = 8) display a mean switching voltage V of 3.0 V (±0.3) and mean reset voltage V of -1.1 V (±0.5) over 50 consecutive sweep cycles. These devices exhibit a large R/R window (up to 10), and sufficient electrical endurance and retention properties to be further examined for radiation sensing. As they exhibit less statistical uncertainty compared to the samples fabricated at 2000 RPM, the devices prepared at 4000 RPM are tested for the detection of soft gamma rays (emitted from low-activity Cs-137 and Am-241 radioactive sources), by assessing the variation in the on-state resistance value upon exposure. The analysis of the probability distributions of the logarithmic R values measured over repeated ON-OFF cycles, before, during and after exposing the devices to radiation, demonstrate a statistical difference. These results pave the way for the fabrication and development of cost-effective soft-gamma ray detectors.

摘要

本文研究了通过有机聚合物辅助溶胶 - 凝胶旋涂法制备,并结合后退火和阴影掩膜金属溅射步骤的Cu/HfO/p Si器件的忆阻开关行为。使用具有成本效益的旋涂法分别以每分钟2000转和4000转(RPM)的沉积速度制备了约190nm和80nm的HfO层。对于两种类型的器件,主要讨论了忆阻特性(V、I和V)以及器件间的电重复性与氧化层均匀性和厚度的相关性。本文展示的器件表现出无电形成且具有双极记忆电阻开关行为,这是电化学金属化(ECM)I - V指纹的典型特征。与以减半旋涂速度制备的器件相比,以4000 RPM沉积的样品器件通常在电性能参数上显示出较小的变化。通常,以4000 RPM制备的样品(n = 8)在50个连续扫描周期内显示平均开关电压V为3.0 V(±0.3),平均复位电压V为 -1.1 V(±0.5)。这些器件表现出较大的R/R窗口(高达10),以及足够的电耐久性和保持特性,可进一步用于辐射传感研究。由于与以2000 RPM制备的样品相比,它们表现出较小的统计不确定性,因此通过评估暴露时导通状态电阻值的变化,对以4000 RPM制备的器件进行了软伽马射线(由低活度Cs - 137和Am - 241放射源发射)检测测试。对器件在辐射暴露之前、期间和之后的重复开 - 关周期中测量的对数R值的概率分布分析表明存在统计差异。这些结果为具有成本效益的软伽马射线探测器的制造和开发铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/1bae2043216a/41598_2019_46443_Fig12_HTML.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/1d7cc82bf18d/41598_2019_46443_Fig1_HTML.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/dc70bbad2773/41598_2019_46443_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/378a7f46d092/41598_2019_46443_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/c87d3c0e13b1/41598_2019_46443_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/52a711aa686d/41598_2019_46443_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/1a0c508c84ff/41598_2019_46443_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0047/6620357/0fd469d712bf/41598_2019_46443_Fig10_HTML.jpg
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