Wang Hao, Wang Xiupu, Xie Jianbing
MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.
Sensors (Basel). 2020 Nov 12;20(22):6455. doi: 10.3390/s20226455.
In this paper, a first-order closed-loop mechatronics model of a micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) with a configurable ASIC is established for closed-loop design and performance analysis. There are usually some nonlinear modules in the gyroscope mechatronics model, and it is difficult to design the closed-loop controllers using classical automatic control theory. An order-reduction method (ORM) based on the Laplace transform and inverse Laplace transform is proposed to linearize the nonlinear modules. The linearized model is proved to show good agreement with the original mechatronics model in terms of system response. The experimental verification was conducted to demonstrate the validation of this method.
本文针对具有可配置专用集成电路（ASIC）的微机电系统（MEMS）磁盘谐振器陀螺仪（DRG），建立了一阶闭环机电一体化模型，用于闭环设计和性能分析。陀螺仪机电一体化模型中通常存在一些非线性模块，使用经典自动控制理论设计闭环控制器较为困难。提出了一种基于拉普拉斯变换和拉普拉斯逆变换的降阶方法（ORM），以线性化非线性模块。结果表明，线性化模型在系统响应方面与原始机电一体化模型具有良好的一致性。通过实验验证了该方法的有效性。
