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用于制造纳米级精确间距的超分子多层模板:对集成纳米间隙/纳米通道组件的下一代器件的启示。

Supramolecular Multilayered Templates for Fabricating Nanometer-Precise Spacings: Implications for the Next-Generation of Devices Integrating Nanogap/Nanochannel Components.

作者信息

Arjmandi-Tash Hadi, van Deursen Pauline M G, Bellunato Amedeo, de Sere Clarisse, Overchenko Zhanna, Gupta Karthick Babu Sai Sankar, Schneider Grégory F

机构信息

Faculty of Science, Leiden Institute of Chemistry, Leiden University, Einsteinweg 55, 2333CC Leiden, The Netherlands.

出版信息

ACS Appl Nano Mater. 2020 Nov 25;3(11):10586-10590. doi: 10.1021/acsanm.0c01578. Epub 2020 Sep 3.

Abstract

Molecular transistors, electromagnetic waveguides, plasmonic devices, and novel generations of nanofluidic channels comprise precisely separated gaps of nanometric and subnanometric spacing. Nonetheless, fabricating a nanogap/nanochannel is a technological challenge, currently tackled by several approaches such as breakdown electromigration and lithography. The aforementioned techniques, though, are limited, respectively, in terms of gap stability and ultimate resolution. Here, nanogaps/nanochannels are templated via the microtomy of metallic thin films embedded in a polymer matrix and precisely separated by a nanometric, sacrificial layer of polyelectrolytes grown via the layer-by-layer (LbL) approach. The versatility of the LbL technique, both in terms of the number of layers and composition of polyelectrolytes, allows to finely tune the spacing across the gap; the LbL template can further be removed by plasma etching. Our findings pave the path toward the realization of molecularly defined functional spacings at the nanometer-scale for the modular implementation of devices integrating nanogap/nanochannel components.

摘要

分子晶体管、电磁波导、等离子体器件以及新一代纳米流体通道都包含精确分离的纳米级和亚纳米级间距的间隙。然而,制造纳米间隙/纳米通道是一项技术挑战,目前有几种方法来应对,如击穿电迁移和光刻技术。不过,上述技术分别在间隙稳定性和最终分辨率方面存在局限性。在此,通过对嵌入聚合物基质中的金属薄膜进行切片来制备纳米间隙/纳米通道,并通过逐层(LbL)方法生长的纳米级聚电解质牺牲层将其精确分离。LbL技术在聚电解质层数和组成方面的多功能性,使得能够精细调节间隙的间距;LbL模板还可以通过等离子体蚀刻去除。我们的研究结果为在纳米尺度上实现分子定义的功能间距铺平了道路,以便模块化地实现集成纳米间隙/纳米通道组件的器件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8aa0/7706106/f517b4bcd796/an0c01578_0002.jpg

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