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在氮化镓上合成高度结晶的黑磷薄膜。

Synthesis of highly crystalline black phosphorus thin films on GaN.

作者信息

Han Dan, Liu Qingming, Zhang Qiang, Ji Jianlong, Sang Shengbo, Xu Bingshe

机构信息

MicroNano System Research Center, Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education & College of Information Engineering, Taiyuan University of Technology, Jinzhong 030600, China.

出版信息

Nanoscale. 2020 Dec 23;12(48):24429-24436. doi: 10.1039/d0nr06764d.

Abstract

Black phosphorus (BP) has recently garnered significant attention due to its specific physical properties. At present, high-quality few-layer and thin-film BP is obtained principally by mechanical exfoliation, restricting its device applications in the future. Here, a facile, direct synthesis of highly crystalline thin-film BP on GaN(001) substrates is achieved by conversion of red phosphorus to BP under atmospheric pressure. The synthesized ≈100-500 nm thick BP thin films with a length ranging from 4 to 15 μm can maintain long-term stability with no sign of oxidation after 5 months of exposure to ambient conditions, as indicated by energy dispersive spectroscopy (EDS). Cross-sectional spherical aberration correction transmission electron microscopy (STEM) analysis of the entire thin-film BP sample did not show any aggregation nucleation through the selected sample. The interface of the BP/GaN heterostructure is atomically sharp, which is very critical for high-performance device fabrication using a direct step in the future. And it is worth noting that there are fluctuations of a few atoms on the surface of GaN. Moreover, using first-principles approaches, here we establish a novel kinetic pathway for fabricating thin-film BP via epitaxial growth. The step of fluctuations with a few atoms on the GaN surface are first preferentially covered by P adatoms, then P adatoms cover the remaining part. Once formed, such a structure of thin-film BP is stable, as tested using EDS and STEM. Combining the results of the experiment and simulation, it can be revealed that the P adatom on undulatory GaN is sufficiently mobile and the undulating surface of GaN plays a major role in forming high-quality thin-films of BP. The preferentially covered nearby step growth mechanism discovered here may enable the mass production of high-quality thin-film BP, and could also be instrumental in achieving the epitaxial growth of thin-film BP on GaN and other 2D materials.

摘要

黑磷(BP)因其特殊的物理性质,近来备受关注。目前,高质量的少层和薄膜黑磷主要通过机械剥离获得,这限制了其未来在器件中的应用。在此,通过在常压下将红磷转化为黑磷,实现了在GaN(001)衬底上简便、直接地合成高结晶度的薄膜黑磷。合成的厚度约为100 - 500 nm、长度在4至15μm之间的黑磷薄膜,在暴露于环境条件5个月后,能保持长期稳定性,能量色散光谱(EDS)显示无氧化迹象。对整个薄膜黑磷样品进行的横截面球差校正透射电子显微镜(STEM)分析表明,所选样品中未出现任何聚集形核现象。BP/GaN异质结构的界面原子级平整,这对于未来直接用于高性能器件制造至关重要。值得注意的是,GaN表面存在几个原子的起伏。此外,利用第一性原理方法,我们在此建立了一种通过外延生长制备薄膜黑磷的新型动力学途径。GaN表面几个原子起伏的台阶首先被P吸附原子优先覆盖,然后P吸附原子覆盖其余部分。一旦形成,这种薄膜黑磷结构是稳定的,经EDS和STEM测试验证。结合实验和模拟结果可知,起伏的GaN上的P吸附原子具有足够的迁移率,GaN的起伏表面在形成高质量的黑磷薄膜中起主要作用。此处发现的优先覆盖附近台阶生长机制可能实现高质量薄膜黑磷的大规模生产,也有助于实现黑磷薄膜在GaN和其他二维材料上的外延生长。

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