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受生物启发的梯度导电性和刚度实现超灵敏电子皮肤。

Bioinspired Gradient Conductivity and Stiffness for Ultrasensitive Electronic Skins.

机构信息

School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Ulsan 44919, Republic of Korea.

出版信息

ACS Nano. 2021 Jan 26;15(1):1795-1804. doi: 10.1021/acsnano.0c09581. Epub 2020 Dec 28.

DOI:10.1021/acsnano.0c09581
PMID:33369402
Abstract

Hierarchical and gradient structures in biological systems with special mechanical properties have inspired innovations in materials design for construction and mechanical applications. Analogous to the control of stress transfer in gradient mechanical structures, the control of electron transfer in gradient electrical structures should enable the development of high-performance electronics. This paper demonstrates a high performance electronic skin (e-skin) via the simultaneous control of tactile stress transfer to an active sensing area and the corresponding electrical current through the gradient structures. The flexible e-skin sensor has extraordinarily high piezoresistive sensitivity at low power and linearity over a broad pressure range based on the conductivity-gradient multilayer on the stiffness-gradient interlocked microdome geometry. While stiffness-gradient interlocked microdome structures allow the efficient transfer and localization of applied stress to the sensing area, the multilayered structure with gradient conductivity enables the efficient regulation of piezoresistance in response to applied pressure by gradual activation of current pathways from outer to inner layers, resulting in a pressure sensitivity of 3.8 × 10 kPa with linear response over a wide range of up to 100 kPa. In addition, the sensor indicated a rapid response time of 0.016 ms, a low minimum detectable pressure level of 0.025 Pa, a low operating voltage (100 μV), and high durability during 8000 repetitive cycles of pressure application (80 kPa). The high performance of the e-skin sensor enables acoustic wave detection, differentiation of gas characterized by different densities, subtle tactile manipulation of objects, and real-time monitoring of pulse pressure waveform.

摘要

具有特殊机械性能的生物系统中的层次和梯度结构启发了用于建筑和机械应用的材料设计创新。类似于梯度机械结构中应力传递的控制,梯度电结构中电子传递的控制应该能够实现高性能电子学的发展。本文通过同时控制梯度结构中触觉应力传递到主动感测区域以及相应的电流,展示了一种高性能电子皮肤(e-skin)。基于刚度梯度互锁微穹顶几何形状上的多层梯度导电性,该柔性 e-skin 传感器在低功率下具有极高的压阻灵敏度,在很宽的压力范围内具有线性度。虽然刚度梯度互锁微穹顶结构允许将施加的应力有效地传递和定位到感测区域,但具有梯度导电性的多层结构能够通过从外到内逐渐激活电流路径来有效地调节压阻响应施加的压力,从而在高达 100 kPa 的宽范围内实现 3.8×10 kPa 的压力灵敏度和线性响应。此外,该传感器的响应时间为 0.016 ms,最低可检测压力水平为 0.025 Pa,工作电压低(100 μV),在 8000 次压力应用(80 kPa)的重复循环中具有高耐用性。e-skin 传感器的高性能可用于检测声波、区分具有不同密度的气体、对物体进行微妙的触觉操作以及实时监测脉搏压力波形。

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