Institute of Microtechnology Technische Universität Braunschweig, Braunschweig, Germany.
Adv Biochem Eng Biotechnol. 2022;179:17-35. doi: 10.1007/10_2020_156.
Microfluidic systems enable manipulating fluids in different functional units which are integrated on a microchip. This chapter describes the basics of microfluidics, where physical effects have a different impact compared to macroscopic systems. Furthermore, an overwiew is given on the microfabrication of these systems. The focus lies on clean-room fabrication methods based on photolithography and soft lithography. Finally, an outlook on advanced maskless micro- and nanofabrication methods is given. Special attention is paid to laser structuring processes.
微流控系统能够在微芯片上集成不同功能单元的流体进行操作。本章介绍了微流控的基础知识，其中物理效应与宏观系统相比有不同的影响。此外，还概述了这些系统的微制造。重点是基于光刻和软光刻的洁净室制造方法。最后，还展望了先进的无掩模微纳制造方法。特别关注激光微纳加工工艺。
