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薄膜晶体管像素电路中电学和光学检测的有效性

Effectiveness of Electrical and Optical Detection at Pixel Circuit on Thin-Film Transistors.

作者信息

Tzu Fu-Ming

机构信息

Department of Marine Engineering, National Kaohsiung University of Science and Technology, Kaohsiung 80543, Taiwan.

出版信息

Micromachines (Basel). 2021 Jan 27;12(2):135. doi: 10.3390/mi12020135.

DOI:10.3390/mi12020135
PMID:33513890
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7910850/
Abstract

The paper presents a typology of electrical open and short defects on thin-film transistors (TFT) using an electrical tester and automatic optical inspection (AOI). The experiment takes the glass 8.5th generation to detect the electrical characteristics engaged with time delay and integration (TDI) charged-coupled-devices (CCDs), a fast line-scan, and a review CCD with five sets of magnification lenses for further inspection. An automatic data acquisition program (ADAP) controls the open/short (O/S) sensor, TDI-CCD, and motor device for machine vision and statistics of substrate defects simultaneously. Furthermore, the quartz mask installed on AOI verified its optical resolution; a TDI-CCD can grab an image of a moving object during transfers of the charge in synchronous scanning with the object that is significant.

摘要

本文介绍了一种使用电气测试仪和自动光学检测（AOI）对薄膜晶体管（TFT）上的电气开路和短路缺陷进行分类的方法。该实验采用第8.5代玻璃来检测与时间延迟和积分（TDI）电荷耦合器件（CCD）相关的电气特性、快速线扫描以及带有五组放大透镜的复查CCD以进行进一步检测。一个自动数据采集程序（ADAP）同时控制开路/短路（O/S）传感器、TDI-CCD和电机装置，用于机器视觉和基板缺陷统计。此外，安装在AOI上的石英掩膜验证了其光学分辨率；TDI-CCD能够在电荷转移过程中与移动物体同步扫描抓取该物体的图像，这一点很重要。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/ee2131ae5c88/micromachines-12-00135-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/e7896762dc38/micromachines-12-00135-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/34511b4bbb83/micromachines-12-00135-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/69a9169e4c62/micromachines-12-00135-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/58cc61d1d041/micromachines-12-00135-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/e6c857e3237b/micromachines-12-00135-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/ecf8c9fb7830/micromachines-12-00135-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/2ce853433fda/micromachines-12-00135-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/9e9a15250d8d/micromachines-12-00135-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/007ebd24f92b/micromachines-12-00135-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/3992df52fd00/micromachines-12-00135-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/b6cf40494926/micromachines-12-00135-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/ee2131ae5c88/micromachines-12-00135-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/e7896762dc38/micromachines-12-00135-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/34511b4bbb83/micromachines-12-00135-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/69a9169e4c62/micromachines-12-00135-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/58cc61d1d041/micromachines-12-00135-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/e6c857e3237b/micromachines-12-00135-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/ecf8c9fb7830/micromachines-12-00135-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/2ce853433fda/micromachines-12-00135-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/9e9a15250d8d/micromachines-12-00135-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/007ebd24f92b/micromachines-12-00135-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/3992df52fd00/micromachines-12-00135-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/b6cf40494926/micromachines-12-00135-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff9b/7910850/ee2131ae5c88/micromachines-12-00135-g012.jpg

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