Tzu Fu-Ming, Chen Jung-Shun, Hsu Shih-Hsien
Department of Marine Engineering, National Kaohsiung University of Science and Technology, Kaohsiung 80543, Taiwan.
Department of Industrial Technology Education, National Kaohsiung Normal University, Kaohsiung 80201, Taiwan.
Micromachines (Basel). 2021 Apr 14;12(4):434. doi: 10.3390/mi12040434.
This paper explores the effectiveness of the white, red, green, and blue light emitted diodes (LEDs) light sources to detect the third layer of the electrode pixel and the fourth layer of the via-hole passivation on thin-film transistors. The time-delay-integration charge-coupled device and a reflective spectrometer were implemented in this experiment. The optical conditions are the same, as each light source and the digital image's binary method also recognize the sharpness and contrast in the task. Consequently, the white and the blue LED light sources can be candidates for the light source for the optical inspection, especially for monochromic blue LED's outperformance among the light sources. The blue LED demonstrates the high spatial resolution and short wavelength's greater energy to trigger the photosensor. Additionally, the metal material has shown a tremendous responsibility in the photosensor with 150 Dn/nj/cm over the sensibility. The mercury Hg-pencil discharge lamp emits the stable spectral wavelength to significantly calibrate the spectrometer's measurement.
本文探讨了白色、红色、绿色和蓝色发光二极管（LED）光源在检测薄膜晶体管上电极像素的第三层和通孔钝化的第四层方面的有效性。本实验采用了延时积分电荷耦合器件和反射光谱仪。光学条件相同，因为每个光源和数字图像的二值化方法在任务中也能识别清晰度和对比度。因此，白色和蓝色LED光源可作为光学检测的光源候选，特别是单色蓝色LED在光源中表现出色。蓝色LED具有高空间分辨率和短波长的更大能量来触发光电传感器。此外，金属材料在光电传感器中表现出巨大的响应能力，灵敏度超过150 Dn/nj/cm。汞铅笔放电灯发射稳定的光谱波长，以显著校准光谱仪的测量。
