Ji Hua-Wei, Lv Bo, Li Yu-Hui, Yang Fan, Qi An-Qi, Wu Xin, Ni Jing
School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Rev Sci Instrum. 2022 Jun 1;93(6):065007. doi: 10.1063/5.0089052.
Aiming at the problems of low output speed, large size, and difficult miniaturization of stacked and sandwich piezoelectric actuators, a patch-type tuning fork piezoelectric actuator model based on the stick-slip effect was designed, in which the dynamic theoretical analysis, the simulation optimization to determine the stator structure parameters, and the experimental research were carried out to obtain the stator structure parameters. The externally applied conditions (the influence model of excitation voltage, excitation frequency, and pre-pressure) on the performance output of piezoelectric actuators will promote the miniaturization and industrialization of tuning fork piezoelectric actuators in the next step. The simulation results show that the integrated output performance of the piezoelectric actuator is best when the angle of the tuning fork is 15°. After optimizing the stator chamfer to 2.5 and 4.5 mm, the tangential amplitude difference of the 15° tuning fork angle actuator is the smallest. The experimental results show that the output speed of the actuator is positively linearly related to the excitation voltage, the maximum output thrust is 8 N when the excitation voltage is 100 V, the excitation frequency is 20.1 kHz, the pre-pressure is 7.5 N, the phase difference of the excitation signal is π/2, and the output speed of the actuator can reach 116 mm/s.
