Tang Yongkui, Kim Eun Sok
Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, CA 90089-0271, USA.
J Microelectromech Syst. 2020 Oct;29(5):692-698. doi: 10.1109/jmems.2020.3000715. Epub 2020 Jun 16.
This paper describes a novel acoustic transducer with dual functionality based on 1-mm-thick lead zirconate titanate (PZT) substrate with a modified air-cavity Fresnel acoustic lens on top. Designed to let ultrasound waves focus over an annular ring region, the lens generates a long depth-of-focus Bessel-like focal beam and multiple trapping zones based on quasi-Airy beams and bottle beams. With 2.32 MHz sinusoidal driving signal at 150 V, the transducer produces a focal zone with 9.9 mm depth-of-focus and 0.8 MPa peak pressure at a focal length of 31.33 mm. With 2.32 MHz continuous sinusoidal drive at 30-35 V, the transducer is able to trap multiple polyethylene microspheres (350-1,000 m in diameter and 1.025-1.130 g/cm in density) in water either simultaneously (when suspended by mechanical agitation or released from water surface) or sequentially (when placed one after another with a pipette). The largest particles the transducer could trap are two 1-mm-diameter microspheres stuck together (1.07 mg in weight, lifted by buoyance and 0.257 N acoustic-field-induced force). When the transducer is moved laterally, some firmly trapped microspheres follow along the transducer's movement, while being trapped. When trapped, some microspheres can rotate due to the rotation torque generated by the quasi-Airy beams.
本文描述了一种基于1毫米厚的锆钛酸铅(PZT)基板且顶部带有改良空气腔菲涅耳声透镜的具有双重功能的新型声换能器。该透镜旨在使超声波聚焦在环形区域上,基于准艾里光束和瓶形光束产生长焦深的贝塞尔样聚焦光束和多个捕获区域。在150 V的2.32 MHz正弦驱动信号下,该换能器在31.33 mm的焦距处产生一个焦深为9.9 mm且峰值压力为0.8 MPa的聚焦区。在30 - 35 V的2.32 MHz连续正弦驱动下,该换能器能够在水中同时(当通过机械搅拌悬浮或从水面释放时)或依次(当用移液管逐个放置时)捕获多个聚乙烯微球(直径为350 - 1000 µm,密度为1.025 - 1.130 g/cm³)。该换能器能够捕获的最大颗粒是两个粘在一起的1毫米直径微球(重量为1.07 mg,由浮力提起,声场诱导力为0.257 N)。当换能器横向移动时,一些被牢固捕获的微球在被捕获的同时会跟随换能器移动。当被捕获时,一些微球会由于准艾里光束产生的旋转扭矩而旋转。