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由超疏水表面密封的微流体无垫片互连件。

Microfluidic gasketless interconnects sealed by superhydrophobic surfaces.

作者信息

Zhao Xiaoxiao, Park Daniel S-W, Soper Steven A, Murphy Michael C

机构信息

Center for BioModular Multiscale Systems for Precision Medicine, Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, LA 70803, USA.

Center for BioModular Multiscale Systems for Precision Medicine Departments of Chemistry and Mechanical Engineering, University of Kansas, Lawrence, KS, 66045, USA.

出版信息

J Microelectromech Syst. 2020 Oct;29(5):894-899. doi: 10.1109/jmems.2020.3000325. Epub 2020 Jun 12.

Abstract

Existing methods for sealing chip-to-chip (or module-to-motherboard) microfluidic interconnects commonly use additional interconnect components (O-rings, gaskets, and tubing), and manual handling expertise for assembly. Novel gasketless superhydrophobic fluidic interconnects (GSFIs) sealed by transparent superhydrophobic surfaces, forming liquid bridges between the fluidic ports for fluidic passages were demonstrated. Two test platforms were designed, fabricated, and evaluated, a multi-port chip system (ten interconnects) and a modules-on-a-motherboard system (four interconnects). System assembly in less than 3 sec was done by embedded magnets and pin-in-V-groove structures. Flow tests with deionized (DI) water, ethanol/water mixture, and plasma confirmed no leakage through the gasketless interconnects up to a maximum flow rate of 100 L/min for the multi-port chip system. The modules-on-a-motherboard system showed no leakage of water at a flow rate of 20 L/min and a pressure drop of 3.71 psi. Characterization of the leakage pressure as a function of the surface tension of the sample liquid in the multi-port chip system revealed that lower surface tension of the liquid led to lower static water contact angles on the superhydrophobic-coated substrate and lower leakage pressures. The high-density, rapidly assembled, gasketless interconnect technology will open up new avenues for chip-to-chip fluid transport in complex microfluidic modular systems.

摘要

现有的用于密封芯片与芯片(或模块与主板)之间微流体互连的方法通常使用额外的互连部件(O形环、垫圈和管道),并且需要人工装配专业技能。本文展示了一种新型的无垫圈超疏水流体互连(GSFI),它由透明超疏水表面密封,在流体端口之间形成液桥以实现流体通道。设计、制造并评估了两个测试平台,一个多端口芯片系统(十个互连)和一个主板上的模块系统(四个互连)。通过嵌入式磁铁和销钉在V形槽结构,在不到3秒的时间内完成了系统组装。使用去离子(DI)水、乙醇/水混合物和等离子体进行的流动测试证实,对于多端口芯片系统,在高达100 L/min的最大流速下,无垫圈互连处无泄漏。主板上的模块系统在流速为20 L/min和压降为3.71 psi时没有漏水现象。对多端口芯片系统中泄漏压力与样品液体表面张力的函数关系进行表征后发现,液体的表面张力越低,超疏水涂层基板上的静态水接触角越小,泄漏压力也越低。这种高密度、快速组装的无垫圈互连技术将为复杂微流体模块化系统中的芯片间流体传输开辟新途径。

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