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集成微波组件的微流控模块——基于不同制造技术视角的应用概述

Microfluidic Modules Integrated with Microwave Components-Overview of Applications from the Perspective of Different Manufacturing Technologies.

作者信息

Jasińska Laura, Malecha Karol

机构信息

Department of Microsystems, Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, 50-370 Wrocław, Poland.

出版信息

Sensors (Basel). 2021 Mar 2;21(5):1710. doi: 10.3390/s21051710.

DOI:10.3390/s21051710
PMID:33801309
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7958350/
Abstract

The constant increase in the number of microfluidic-microwave devices can be explained by various advantages, such as relatively easy integration of various microwave circuits in the device, which contains microfluidic components. To achieve the aforementioned solutions, four trends of manufacturing appear-manufacturing based on epoxy-glass laminates, polymer materials (mostly common in use are polydimethylsiloxane (PDMS) and polymethyl 2-methylpropenoate (PMMA)), glass/silicon substrates, and Low-Temperature Cofired Ceramics (LTCCs). Additionally, the domains of applications the microwave-microfluidic devices can be divided into three main fields-dielectric heating, microwave-based detection in microfluidic devices, and the reactors for microwave-enhanced chemistry. Such an approach allows heating or delivering the microwave power to the liquid in the microchannels, as well as the detection of its dielectric parameters. This article consists of a literature review of exemplary solutions that are based on the above-mentioned technologies with the possibilities, comparison, and exemplary applications based on each aforementioned technology.

摘要

微流控-微波设备数量的不断增加可归因于多种优势，比如在包含微流控部件的设备中相对容易集成各种微波电路。为实现上述解决方案，出现了四种制造趋势——基于环氧玻璃层压板、聚合物材料（最常用的是聚二甲基硅氧烷（PDMS）和聚甲基丙烯酸甲酯（PMMA））、玻璃/硅基板以及低温共烧陶瓷（LTCC）的制造。此外，微波-微流控设备的应用领域可分为三个主要领域——介电加热、微流控设备中基于微波的检测以及用于微波增强化学的反应器。这种方法能够将微波功率加热或传递至微通道中的液体，同时还能检测其介电参数。本文包括对基于上述技术的示例性解决方案的文献综述，以及基于每种上述技术的可能性、比较和示例性应用。

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