Maharjan Rijan, Bohora Sanket, Bhattarai Pravin, Crowe Iain, Curry Richard J, Hogg Richard, Childs David, Dhakal Ashim
Opt Express. 2021 Mar 29;29(7):10480-10490. doi: 10.1364/OE.419618.
We demonstrate an on-chip silicon-on-insulator (SOI) device to generate a non-diffracting beam of ≈850 µm length from a diffractive axicon-like lens etched using a low resolution (200 nm feature size, 250 nm gap) deep-ultraviolet lithographic fabrication. The device consists of circular gratings with seven stages of 1x2 multimode interferometers. We present a technique to apodize the gratings azimuthally by breaking up the circles into arcs which successfully increased the penetration depth in the gratings from ≈5 µm to ≈60 µm. We characterize the device's performance by coupling 1300±50 nm swept source laser in to the chip from the axicon and measuring the out-coupled light from a grating coupler. Further, we also present the implementation of balanced homodyne detection method for the spectral characterization of the device and show that the position of the output lobe of the axicon does not change significantly with wavelength.
我们展示了一种片上绝缘体上硅(SOI)器件,该器件可通过使用低分辨率(特征尺寸为200 nm,间隙为250 nm)的深紫外光刻制造技术蚀刻出的类似衍射轴棱锥的透镜,产生长度约为850 µm的非衍射光束。该器件由具有七级1x2多模干涉仪的圆形光栅组成。我们提出了一种通过将圆分解为弧来对光栅进行方位角切趾的技术,该技术成功地将光栅中的穿透深度从约5 µm增加到了约60 µm。我们通过将1300±50 nm扫频光源激光器从轴棱锥耦合到芯片中,并测量来自光栅耦合器的外耦合光来表征该器件的性能。此外,我们还介绍了用于该器件光谱表征的平衡零差检测方法的实现,并表明轴棱锥输出瓣的位置不会随波长发生显著变化。