Kang Hyeokin, Lee Joohyung, Kim Young-Jin, Kim Seung-Woo
Department of Mechanical System Design Engineering, Seoul National University of Science and Technology (Seoultech), 232 Gongneung-ro, Nowon-gu, Seoul 01811, Republic of Korea.
Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon 34141, Republic of Korea.
Sensors (Basel). 2023 Jul 9;23(14):6253. doi: 10.3390/s23146253.
We present a phase-locked synthetic wavelength interferometer that enables a complete elimination of cyclic errors in absolute distance measurements. With this method, the phase difference between the reference and measurement paths is fed back into a phase lock-in system, which is then used to control the synthetic wavelength and set the phase difference to zero using an external cavity acousto-optic modulator. We validated the cyclic error removal of the proposed phase-locked method by comparing it with the conventional phase-measuring method of the synthetic wavelength interferometer. By analyzing the locked error signal, we achieved a precision of 0.6 mrad in phase without any observed cyclic errors.
我们提出了一种锁相合成波长干涉仪,它能够完全消除绝对距离测量中的周期性误差。通过这种方法,参考路径和测量路径之间的相位差被反馈到锁相系统中,然后该系统用于控制合成波长,并使用外腔声光调制器将相位差设置为零。我们通过将所提出的锁相方法与合成波长干涉仪的传统相位测量方法进行比较,验证了其对周期性误差的消除效果。通过分析锁定误差信号,我们实现了相位精度为0.6毫弧度,且未观察到任何周期性误差。