Li Lizhu, Tang Guo, Shi Zhao, Ding He, Liu Changbo, Cheng Dali, Zhang Qianyi, Yin Lan, Yao Zhibo, Duan Lian, Zhang Donghao, Wang Chenggong, Feng Meixin, Sun Qian, Wang Qiang, Han Yanjun, Wang Lai, Luo Yi, Sheng Xing
Department of Electronic Engineering, Beijing National Research Center for Information Science and Technology, Center for Flexible Electronics Technology, Tsinghua University, 100084 Beijing, China.
Beijing Engineering Research Center of Mixed Reality and Advanced Display, School of Optics and Photonics, Beijing Institute of Technology, 100081 Beijing, China.
Proc Natl Acad Sci U S A. 2021 May 4;118(18). doi: 10.1073/pnas.2023436118.
Inorganic semiconductor-based microscale light-emitting diodes (micro-LEDs) have been widely considered the key solution to next-generation, ubiquitous lighting and display systems, with their efficiency, brightness, contrast, stability, and dynamic response superior to liquid crystal or organic-based counterparts. However, the reduction of micro-LED sizes leads to the deteriorated device performance and increased difficulties in manufacturing. Here, we report a tandem device scheme based on stacked red, green, and blue (RGB) micro-LEDs, for the realization of full-color lighting and displays. Thin-film micro-LEDs (size ∼100 μm, thickness ∼5 μm) based on III-V compound semiconductors are vertically assembled via epitaxial liftoff and transfer printing. A thin-film dielectric-based optical filter serves as a wavelength-selective interface for performance enhancement. Furthermore, we prototype arrays of tandem RGB micro-LEDs and demonstrate display capabilities. These materials and device strategies provide a viable path to advanced lighting and display systems.
基于无机半导体的微尺度发光二极管（微型发光二极管）被广泛认为是下一代无处不在的照明和显示系统的关键解决方案，其效率、亮度、对比度、稳定性和动态响应优于液晶或有机基同类产品。然而，微型发光二极管尺寸的减小会导致器件性能下降以及制造难度增加。在此，我们报告了一种基于堆叠红、绿、蓝（RGB）微型发光二极管的串联器件方案，用于实现全彩照明和显示。基于III-V族化合物半导体的薄膜微型发光二极管（尺寸约100μm，厚度约5μm）通过外延剥离和转移印刷进行垂直组装。基于薄膜电介质的光学滤波器用作性能增强的波长选择性界面。此外，我们制作了串联RGB微型发光二极管阵列并展示了显示能力。这些材料和器件策略为先进的照明和显示系统提供了一条可行的途径。
