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采用氮化铟镓/铝镓铟磷异质集成的单片全彩有源矩阵微型发光二极管微显示器。

Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration.

作者信息

Qi Longheng, Li Peian, Zhang Xu, Wong Ka Ming, Lau Kei May

机构信息

Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China.

出版信息

Light Sci Appl. 2023 Oct 30;12(1):258. doi: 10.1038/s41377-023-01298-w.

Abstract

A prototype of full-color active-matrix micro-light-emitting diode (micro-LED) micro-display with a pixel density of 391 pixel per inch (ppi) using InGaN/AlGaInP heterogeneous integration is demonstrated. InGaN blue/green dual-color micro-LED arrays realized on a single metal organic chemical vapor deposition (MOCVD)-grown GaN-on-Si epiwafer and AlGaInP red micro-LED arrays are both monolithically fabricated, followed by the integration with a common complementary metal oxide semiconductor (CMOS) backplane via flip-chip bonding technology to form a double-layer thin-film display structure. Full-color images with decent color gamut and brightness are successfully displayed through the fine adjustment of driving current densities of RGB subpixels. This full-color display combines the advantages of high quantum efficiency of InGaN material on blue/green light and AlGaInP material on red light through heterogeneous integration and high pixel density through monolithic fabrication approach, demonstrating the feasibility and prospects of high brightness, good color performance, and high-resolution micro-LED micro-displays in future metaverse applications.

摘要

展示了一种采用氮化铟镓/铝镓铟磷异质集成的全彩色有源矩阵微发光二极管(micro-LED)微显示器原型,其像素密度为每英寸391像素(ppi)。在单个金属有机化学气相沉积(MOCVD)生长的硅基氮化镓外延片上实现的氮化铟镓蓝/绿双色微LED阵列和铝镓铟磷红色微LED阵列均采用单片制造,然后通过倒装芯片键合技术与通用互补金属氧化物半导体(CMOS)背板集成,形成双层薄膜显示结构。通过对RGB子像素驱动电流密度的精细调整,成功显示出具有良好色域和亮度的全彩色图像。这种全彩色显示器通过异质集成结合了氮化铟镓材料在蓝/绿光上的高量子效率和铝镓铟磷材料在红光上的高量子效率的优点,以及通过单片制造方法实现的高像素密度,展示了高亮度、良好色彩性能和高分辨率微LED微显示器在未来元宇宙应用中的可行性和前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2987/10613616/6bdfe3397089/41377_2023_1298_Fig1_HTML.jpg

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