Britton Chance Center for Biomedical Photonics, Wuhan National Laboratory for Optoelectronics-Huazhong University of Science and Technology, Wuhan, Hubei 430074, China.
MoE Key Laboratory for Biomedical Photonics, Collaborative Innovation Center for Biomedical Engineering, School of Engineering Sciences, Huazhong University of Science and Technology, Wuhan, Hubei 430074, China.
Nano Lett. 2021 May 12;21(9):3887-3893. doi: 10.1021/acs.nanolett.1c00403. Epub 2021 Apr 27.
Far-field super-resolution optical microscopies have achieved incredible success in life science for visualization of vital nanostructures organized in single cells. However, such resolution power has been much less extended to material science for inspection of human-made ultrafine nanostructures, simply because the current super-resolution optical microscopies modalities are rarely applicable to nonfluorescent samples or unlabeled systems. Here, we report an antiphase demodulation pump-probe (DPP) super-resolution microscope for direct optical inspection of integrated circuits (ICs) with a lateral resolution down to 60 nm. Because of the strong pump-probe (PP) signal from copper, we performed label-free super-resolution imaging of multilayered copper interconnects on a small central processing unit (CPU) chip. The label-free super-resolution DPP optical microscopy opens possibilities for easy, fast, and large-scale electronic inspection in the whole pipeline chain for designing and manufacturing ICs.
远场超分辨率光学显微镜在生命科学领域取得了巨大的成功，可用于可视化单个细胞中组织的重要纳米结构。然而，由于当前的超分辨率光学显微镜模式很少适用于非荧光样品或未标记的系统，因此这种分辨率能力在材料科学领域的应用要少得多。在这里，我们报告了一种反相解调泵浦-探测（DPP）超分辨率显微镜，用于对集成电路（IC）进行直接光学检查，其横向分辨率可达 60nm。由于铜具有很强的泵浦-探测（PP）信号，我们对中央处理器（CPU）芯片上的多层铜互连进行了无标记的超分辨率成像。无标记的超分辨率 DPP 光学显微镜为整个集成电路设计和制造的流水线链中的电子检查提供了简便、快速和大规模的可能性。
