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通过受限空间化学气相沉积法合成的大规模MoS单层膜。

Large-scale MoSSemonolayers synthesized by confined-space CVD.

作者信息

Zhang Jinming, Qian Yezheng, Nan Haiyan, Gu Xiaofeng, Xiao Shaoqing

机构信息

Engineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, Wuxi 214122, People's Republic of China.

出版信息

Nanotechnology. 2021 Jun 7;32(35). doi: 10.1088/1361-6528/ac0026.

Abstract

Alloy engineering is efficient in modulating the electronic structure and physical and chemical properties of Transition metal dichalcogenides (TMDs). Here, we develop an efficient and simple confined-space CVD strategy by using a smaller quartz boat nested in a larger quartz boat for the preparation of ternary alloy MoSSemonolayers on SiO/Si substrates with controllable composition. The effect of hydrogen ratio of the mixed carrier gas (Ar/H) on the resultant flakes are systematically investigated. A hydrogon ratio of 15% is demonstrated to be the most appropriate to synthesize large size (more than 400m) single crystalline MoSSealloy monolayers. The composition of the alloy can also be changed in a full range (2= 0-2) by changing the weight ratio of Se and S powder. The as-grown monolayer MoSSealloys present continuously high crystal quality in terms of Raman and PL measurements. Furthermore, to visible light (532 nm), the MoSSebased photodetectors display wonderful photoresponse with a fast response of less than 50 ms. Our work may be usedful in directing the synthesis of TMDs alloys as well as their optoelectronic applications.

摘要

合金工程在调节过渡金属二硫属化物(TMDs)的电子结构以及物理和化学性质方面是有效的。在此,我们通过使用嵌套在较大石英舟中的较小石英舟,开发了一种高效且简单的受限空间化学气相沉积策略,用于在SiO/Si衬底上制备具有可控组成的三元合金MoSSe单层。系统地研究了混合载气(Ar/H₂)的氢气比例对所得薄片的影响。结果表明,15%的氢气比例最适合合成大尺寸(超过400μm)的单晶MoSSe合金单层。通过改变Se和S粉末的重量比,合金的组成也可以在全范围(x = 0 - 2)内变化。就拉曼和光致发光测量而言,生长的单层MoSSe合金呈现出持续的高质量晶体。此外,对于可见光(532nm),基于MoSSe的光电探测器显示出出色的光响应,响应速度快于50ms。我们的工作可能有助于指导TMDs合金的合成及其光电子应用。

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