Marshall A L, Holzer J, Stejskal P, Stephens C J, Vystavěl T, Whiting M J
Department of Mechanical Engineering Sciences, The University of Surrey, Guildford, GU2 7XH; Thermo Fisher Scientific, Unit 24 Birches Industrial Estate, East Grinstead, UK, RH19 1UB.
Institute of Physics of Materials & CEITEC IPM, Academy of Sciences of the Czech Republic, Žižkova 22, 61600 Brno, Czech Republic; Thermo Fisher Scientific, Vlastimila Pecha 1282/12, 62700 Brno, Czech Republic.
Ultramicroscopy. 2021 Jul;226:113294. doi: 10.1016/j.ultramic.2021.113294. Epub 2021 Apr 30.
Performing EBSD with a horizontal sample and a parallel EBSD detector sensor, enables safer specimen movements for data collection of large specimen areas and improves the longitudinal spatial resolution. The collection of electron backscattering patterns (EBSPs) at normal incidence to the electron beam has been revisited via the use of a direct electron detection (DED) sensor. In this article we present a fully operational DED EBSD detection system in this geometry, referred to as the tilt-free geometry. A well-defined Σ=3[101]{121} twin boundary in a Molybdenum bicrystal was used to measure the physical spatial resolution of the EBSD detector in this tilt-free geometry. In this study, two separate methods for estimating the spatial resolution of EBSD, one based on a pattern quality metric and the other on a normalised cross correlation coefficient were used. The spatial resolution was determined at accelerating voltages of 8 kV, 10 kV, 12 kV, 15 kV and 20 kV ranging from ~22-38 nm using the pattern quality method and ~31-46 nm using the normalised cross correlation method.
使用水平样品和并行电子背散射衍射（EBSD）探测器传感器进行EBSD分析，能够更安全地移动样品以采集大样品区域的数据，并提高纵向空间分辨率。通过使用直接电子检测（DED）传感器，重新研究了在与电子束垂直入射时收集电子背散射图案（EBSP）的方法。在本文中，我们展示了一种在这种几何结构下完全运行的DED EBSD检测系统，称为无倾斜几何结构。在钼双晶体中使用明确的Σ=3[101]{121}孪晶界来测量这种无倾斜几何结构下EBSD探测器的物理空间分辨率。在这项研究中，使用了两种单独的方法来估计EBSD的空间分辨率，一种基于图案质量度量，另一种基于归一化互相关系数。使用图案质量方法在8 kV、10 kV、12 kV、15 kV和20 kV的加速电压下确定的空间分辨率范围为22 - 38 nm，使用归一化互相关方法确定的空间分辨率范围为31 - 46 nm。
