Tripathi Abhishek, Zaefferer Stefan
Max-Planck-Institut für Eisenforschung GmbH, Max-Planck-Straße 1, 40237, Düsseldorf, Germany.
Max-Planck-Institut für Eisenforschung GmbH, Max-Planck-Straße 1, 40237, Düsseldorf, Germany.
Ultramicroscopy. 2019 Dec;207:112828. doi: 10.1016/j.ultramic.2019.112828. Epub 2019 Aug 22.
We measured the physical lateral resolution of the electron backscatter diffraction (EBSD) technique for the case of pure magnesium and tungsten and compared these data with other values from literature. Spatial resolution, among other parameters, depends significantly on the accelerating voltage and the atomic number of the material. For the case of lighter metals, it is supposed to be lower than in the case of heavier metals for a given accelerating voltage. In the present work, lateral resolution was measured in dependence of accelerating voltage on a straight high angle grain boundary which was positioned parallel (horizontal boundary) and perpendicular (vertical boundary) to the tilt axis of the specimen. For magnesium the best lateral resolution of 240 nm was obtained at an accelerating voltage of 5 kV. The resolution dramatically worsened to values as high as 3500 nm as the voltage was increased from 15 kV to 30 kV. The aspect ratio of horizontal and vertical lateral resolution tended to 1.0 at the accelerating voltage of 5 kV and to 2.5 at the accelerating voltage of 30 kV. These values as function of accelerating voltages were compared with those obtained on the high atomic number metal tungsten. Here resolution at 5 kV was about a quarter of that of magnesium. With increasing voltage, the value almost didn't change. For all voltages the resolution aspect ratio stayed close to 1.0.
我们测量了电子背散射衍射（EBSD）技术对纯镁和钨的物理横向分辨率，并将这些数据与文献中的其他值进行了比较。空间分辨率以及其他参数，很大程度上取决于加速电压和材料的原子序数。对于较轻的金属，在给定的加速电压下，其空间分辨率应该低于较重金属的情况。在本工作中，在与样品倾斜轴平行（水平边界）和垂直（垂直边界）的直高角度晶界上，测量了横向分辨率与加速电压的关系。对于镁，在5 kV的加速电压下获得了240 nm的最佳横向分辨率。当电压从15 kV增加到30 kV时，分辨率急剧恶化至高达3500 nm的值。水平和垂直横向分辨率的纵横比在5 kV的加速电压下趋于1.0，在30 kV的加速电压下趋于2.5。将这些作为加速电压函数的值与在高原子序数金属钨上获得的值进行了比较。此处5 kV时的分辨率约为镁的四分之一。随着电压升高，该值几乎不变。对于所有电压，分辨率纵横比都接近1.0。
