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通过在超薄硫族化物基质上进行激光直写实现二氧化钒的超快、动力学受限、环境合成。

Ultrafast, Kinetically Limited, Ambient Synthesis of Vanadium Dioxides through Laser Direct Writing on Ultrathin Chalcogenide Matrix.

作者信息

Wang Bolun, Peng Ruixuan, Wang Xuewen, Yang Yueyang, Wang Enze, Xin Zeqin, Sun Yufei, Li Chenyu, Wu Yonghuang, Wei Jinquan, Sun Jingbo, Liu Kai

机构信息

State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China.

出版信息

ACS Nano. 2021 Jun 22;15(6):10502-10513. doi: 10.1021/acsnano.1c03050. Epub 2021 May 19.

DOI:10.1021/acsnano.1c03050
PMID:34009934
Abstract

Vanadium dioxide (VO) is a strongly correlated electronic material and has attracted significant attention due to its metal-to-insulator transition and diverse smart applications. Traditional synthesis of VO usually requires minutes or hours of global heating and low oxygen partial pressure to achieve thermodynamic control of the valence state. Further patterning of VO through a series of lithography and etching processes may inevitably change its surface valence, which poses a great challenge for the assembly of micro- and nanoscale VO-based heterojunction devices. Herein, we report an ultrafast method to simultaneously synthesize and pattern VO on the time scale of seconds under ambient conditions through laser direct writing on a VS "canvas". The successful ambient synthesis of VO is attributed to the ultrafast local heating and cooling process, resulting in controlled freezing of the intermediate oxidation phase during the relatively long kinetic reaction. A Mott memristor based on a VS-VO-VS lateral heterostructure can be fabricated and integrated with a MoS channel, delivering a transistor with abrupt switching transfer characteristics. The other device with a VSO channel exhibits a large negative temperature coefficient of approximately 4.5%/K, which is highly desirable for microbolometers. The proposed approach enables fast and efficient integration of VO-based heterojunction devices and is applicable to other intriguing intermediate phases of oxides.

摘要

二氧化钒(VO₂)是一种强关联电子材料,因其金属-绝缘体转变及多样的智能应用而备受关注。传统的VO₂合成通常需要数分钟或数小时的整体加热以及低氧分压,以实现对价态的热力学控制。通过一系列光刻和蚀刻工艺对VO₂进行进一步图案化,可能不可避免地改变其表面价态,这对基于微纳尺度VO₂的异质结器件的组装构成了巨大挑战。在此,我们报道了一种超快方法,通过在VS“画布”上进行激光直写,在环境条件下于数秒的时间尺度内同时合成并图案化VO₂。VO₂在环境条件下的成功合成归因于超快的局部加热和冷却过程,导致在相对较长的动力学反应过程中中间氧化相的可控冻结。基于VS-VO₂-VS横向异质结构的莫特忆阻器能够被制造出来,并与MoS₂通道集成,从而实现具有突然开关转移特性的晶体管。另一种具有VSO通道的器件表现出约4.5%/K的大负温度系数,这对于微测辐射热计来说是非常理想的。所提出的方法能够实现基于VO₂的异质结器件的快速高效集成,并且适用于其他有趣的氧化物中间相。

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