一种用于芯片尺寸扫描光学显微镜的新方法。

A Novel Approach for a Chip-Sized Scanning Optical Microscope.

作者信息

Canals Joan, Franch Nil, Moro Victor, Moreno Sergio, Prades Juan Daniel, Romano-Rodríguez Albert, Bornemann Steffen, Bezshlyakh Daria D, Waag Andreas, Vogelbacher Florian, Schrittwieser Stefan, Kluczyk-Korch Katarzyna, Auf der Maur Matthias, Di Carlo Aldo, Diéguez Angel

机构信息

Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain.

Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany.

出版信息

Micromachines (Basel). 2021 May 6;12(5):527. doi: 10.3390/mi12050527.

DOI:10.3390/mi12050527

PMID:34066638

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8148435/

Abstract

The recent advances in chip-size microscopy based on optical scanning with spatially resolved nano-illumination light sources are presented. This new straightforward technique takes advantage of the currently achieved miniaturization of LEDs in fully addressable arrays. These nano-LEDs are used to scan the sample with a resolution comparable to the LED sizes, giving rise to chip-sized scanning optical microscopes without mechanical parts or optical accessories. The operation principle and the potential of this new kind of microscope are analyzed through three different implementations of decreasing LED dimensions from 20 µm down to 200 nm.

摘要

本文介绍了基于具有空间分辨纳米照明光源的光学扫描的芯片尺寸显微镜的最新进展。这种新的直接技术利用了当前在完全可寻址阵列中实现的发光二极管（LED）小型化。这些纳米LED用于以与LED尺寸相当的分辨率扫描样品，从而产生无需机械部件或光学附件的芯片尺寸扫描光学显微镜。通过将LED尺寸从20微米减小到200纳米的三种不同实现方式，分析了这种新型显微镜的工作原理和潜力。