Zhang Xiaoyang, Cao Zhi, Wang Shanlai, Yao Lei, Yu Haitao
School of Microelectronics, Shanghai University, Shanghai 200444, China.
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Micromachines (Basel). 2023 Apr 25;14(5):929. doi: 10.3390/mi14050929.
The traditional thermal gravimetric analyzer (TGA) has a noticeable thermal lag effect, which restricts the heating rate, while the micro-electro-mechanical system thermal gravimetric analyzer (MEMS TGA) utilizes a resonant cantilever beam structure with high mass sensitivity, on-chip heating, and a small heating area, resulting in no thermal lag effect and a fast heating rate. To achieve high-speed temperature control for MEMS TGA, this study proposes a dual fuzzy proportional-integral-derivative (PID) control method. The fuzzy control adjusts the PID parameters in real-time to minimize overshoot while effectively addressing system nonlinearities. Simulation and actual testing results indicate that this temperature control method has a faster response speed and less overshoot compared to traditional PID control, significantly improving the heating performance of MEMS TGA.
传统热重分析仪（TGA）存在明显的热滞后效应，这限制了加热速率，而微机电系统热重分析仪（MEMS TGA）采用具有高质量灵敏度的谐振悬臂梁结构、片上加热以及小加热面积，从而不存在热滞后效应且加热速率快。为实现MEMS TGA的高速温度控制，本研究提出了一种双模糊比例积分微分（PID）控制方法。模糊控制实时调整PID参数，以最小化超调量，同时有效解决系统非线性问题。仿真和实际测试结果表明，与传统PID控制相比，这种温度控制方法具有更快的响应速度和更小的超调量，显著提高了MEMS TGA的加热性能。
