Ou Xiangpeng, Yang Yan, Sun Fujun, Zhang Peng, Tang Bo, Li Bin, Liu Ruonan, Liu Daoquin, Li Zhihua
Opt Express. 2021 Jun 7;29(12):19058-19067. doi: 10.1364/OE.428159.
A ring resonator-based biochemistry sensor with a wide range, ultra-compact footprint, and high sensitivity is proposed, which utilizes a suspended slot hybrid plasmonic (SSHP) waveguide. The waveguide consists of a suspended Si nanowire separated from a Cu metal surface by a nanoscale air gap. The hybridization of fundamental mode of a Si channel waveguide with the surface plasmon polariton (SPP) mode of Cu-Si interface achieves a strong light confinement, high waveguide sensitivity (Sw), and low optical loss, showing a great potential in integrated optical sensor. The sensitivity, the detection limit and the detection range of the SSHP waveguide-based biochemistry sensor with a miniaturized radius of 1 µm are numerically demonstrated as 458.1 nm/RIU, 3.7 × 10 RIU and 0.225 RIU, respectively. These superior performances as well as the fully CMOS compatibility enable the integrated optical sensing applications.
提出了一种基于环形谐振器的生物化学传感器，其具有宽范围、超紧凑的占地面积和高灵敏度，该传感器利用了悬浮槽混合等离子体（SSHP）波导。该波导由一根悬浮的硅纳米线组成，该纳米线通过纳米级气隙与铜金属表面分离。硅通道波导的基模与铜 - 硅界面的表面等离子体激元（SPP）模的杂化实现了强光限制、高波导灵敏度（Sw）和低光学损耗，在集成光学传感器中显示出巨大潜力。数值证明，半径为1 µm的基于SSHP波导的生物化学传感器的灵敏度、检测限和检测范围分别为458.1 nm/RIU、3.7×10 RIU和0.225 RIU。这些优异的性能以及与完全CMOS的兼容性使得集成光学传感应用成为可能。
