Molina Juan, Escobar Javier E, Ramos Daniel, Gil-Santos Eduardo, Ruz José J, Tamayo Javier, San Paulo Álvaro, Calleja Montserrat
Instituto de Micro y Nanotecnología, IMN-CNM, CSIC (CEI UAM+CSIC), Isaac Newton 8, 28760 Tres Cantos, Madrid, Spain.
Nano Lett. 2021 Aug 11;21(15):6617-6624. doi: 10.1021/acs.nanolett.1c02056. Epub 2021 Jul 21.
Dynamic range quantifies the linear operation regime available in nanomechanical resonators. Nonlinearities dominate the response of flexural beams in the limit of very high aspect ratio and very small diameter, which leads to expectation of low dynamic range for nanowire resonators in general. However, the highest achievable dynamic range for nanowire resonators with practical dimensions remains to be determined. We report dynamic range measurements on singly clamped silicon nanowire resonators reaching remarkably high values of up to 90 dB obtained with a simple harmonic actuation scheme. We explain these measurements by a comprehensive theoretical examination of dynamic range in singly clamped flexural beams including the effect of tapering, a usual feature of semiconductor nanowires. Our analysis reveals the nanowire characteristics required for broad linear operation, and given the relationship between dynamic range and mass sensing performance, it also enables analytical determination of mass detection limits, reaching atomic-scale resolution for feasible nanowires.
动态范围量化了纳米机械谐振器中可用的线性操作范围。在非常高的纵横比和非常小的直径极限下，非线性主导了弯曲梁的响应，这导致一般认为纳米线谐振器的动态范围较低。然而，具有实际尺寸的纳米线谐振器可实现的最高动态范围仍有待确定。我们报告了对单端夹紧硅纳米线谐振器的动态范围测量，通过简单的谐波驱动方案获得了高达90 dB的显著高值。我们通过对单端夹紧弯曲梁的动态范围进行全面的理论研究来解释这些测量结果，其中包括半导体纳米线常见的锥形效应。我们的分析揭示了实现宽线性操作所需的纳米线特性，并且鉴于动态范围与质量传感性能之间的关系，它还能够分析确定质量检测极限，对于可行的纳米线达到原子尺度分辨率。
