• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

用于微电子的全固态薄膜微型电池。

All-Solid-State Thin Film μ-Batteries for Microelectronics.

作者信息

Wu Tian, Dai Wei, Ke Meilu, Huang Qing, Lu Li

机构信息

Hubei Engineering Technology Research Center of Environmental Purification Materials, Hubei University of Education, Gaoxin Road 129, Wuhan, 430205, P. R. China.

Department of Mechanical Engineering, National University of Singapore, Singapore, 117575, Singapore.

出版信息

Adv Sci (Weinh). 2021 Oct;8(19):e2100774. doi: 10.1002/advs.202100774. Epub 2021 Aug 5.

DOI:10.1002/advs.202100774
PMID:34351691
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8498886/
Abstract

Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid-state thin-film μ-batteries. Different from the current button batteries, the μ-battery can directly be integrated on microchips forming a very compact "system on chip" since no liquid electrolyte is used in the μ-battery. The all-solid-state battery (ASSB) that uses solid-state electrolyte has become a research trend because of its high safety and increased capacity. The solid-state thin-film μ-battery belongs to the family of ASSB but in a small format. However, a lot of scientific and technical issues and challenges are to be resolved before its real application, including the ionic conductivity of the solid-state electrolyte, the electrical conductivity of the electrode, integration technologies, electrochemical-induced strain, etc. To achieve this goal, understanding the processing of thin films and fundamentals of ion transfer in the solid-state electrolytes and hence in the μ-batteries becomes utmost important. This review therefore focuses on solid-state ionics and provides inside of ion transportation in the solid state and effects of chemistry on electrochemical behaviors and proposes key technology for processing of the μ-battery.

摘要

微电子学以及微/纳机电系统的不断进步使得微型储能设备即固态薄膜微电池得以应用。与目前的纽扣电池不同，微电池无需使用液体电解质，因此能够直接集成在微芯片上，形成非常紧凑的“片上系统”。使用固态电解质的全固态电池（ASSB）因其高安全性和更高的容量而成为研究趋势。固态薄膜微电池属于全固态电池家族，但尺寸较小。然而，在其实际应用之前，还有许多科学技术问题和挑战有待解决，包括固态电解质的离子电导率、电极的电导率、集成技术、电化学诱导应变等。为实现这一目标，了解薄膜的制备工艺以及固态电解质中离子转移的基本原理，进而了解微电池中的离子转移原理变得至关重要。因此，本综述聚焦于固态离子学，阐述了固态中的离子传输以及化学对电化学行为的影响，并提出了微电池制备的关键技术。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/7103bf996d5e/ADVS-8-2100774-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/a7e41c01319e/ADVS-8-2100774-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/202cafdb6ef3/ADVS-8-2100774-g027.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/61403a298879/ADVS-8-2100774-g033.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/9fbfcb058ef9/ADVS-8-2100774-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/e34ff1e88438/ADVS-8-2100774-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/aea1352a1eb1/ADVS-8-2100774-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/2834162e4c48/ADVS-8-2100774-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/ca203068ec98/ADVS-8-2100774-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f119fe4b3226/ADVS-8-2100774-g023.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/fe1f82a370d5/ADVS-8-2100774-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f080f2c76c68/ADVS-8-2100774-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/764dc43b5a8b/ADVS-8-2100774-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f362bb89d2b0/ADVS-8-2100774-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f2136a7448e0/ADVS-8-2100774-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/7beb5dcf31f3/ADVS-8-2100774-g025.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/969fc8fafe67/ADVS-8-2100774-g034.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/414353d7d52f/ADVS-8-2100774-g028.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/6ab66b0494c2/ADVS-8-2100774-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/a1bd5882f8d9/ADVS-8-2100774-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/1af2cba4679d/ADVS-8-2100774-g032.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/9582316932f9/ADVS-8-2100774-g029.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/b83682f2469d/ADVS-8-2100774-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/430b74998c0d/ADVS-8-2100774-g024.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f72397626311/ADVS-8-2100774-g035.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/66e0cd0e3f31/ADVS-8-2100774-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f26841f23e2f/ADVS-8-2100774-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/301c52daf82a/ADVS-8-2100774-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/9bf5a1ff7b38/ADVS-8-2100774-g026.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/6d2e43bf19db/ADVS-8-2100774-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/ddb1eaa7a627/ADVS-8-2100774-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/c6ac7972da58/ADVS-8-2100774-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/7103bf996d5e/ADVS-8-2100774-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/a7e41c01319e/ADVS-8-2100774-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/202cafdb6ef3/ADVS-8-2100774-g027.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/61403a298879/ADVS-8-2100774-g033.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/9fbfcb058ef9/ADVS-8-2100774-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/e34ff1e88438/ADVS-8-2100774-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/aea1352a1eb1/ADVS-8-2100774-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/2834162e4c48/ADVS-8-2100774-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/ca203068ec98/ADVS-8-2100774-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f119fe4b3226/ADVS-8-2100774-g023.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/fe1f82a370d5/ADVS-8-2100774-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f080f2c76c68/ADVS-8-2100774-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/764dc43b5a8b/ADVS-8-2100774-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f362bb89d2b0/ADVS-8-2100774-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f2136a7448e0/ADVS-8-2100774-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/7beb5dcf31f3/ADVS-8-2100774-g025.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/969fc8fafe67/ADVS-8-2100774-g034.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/414353d7d52f/ADVS-8-2100774-g028.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/6ab66b0494c2/ADVS-8-2100774-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/a1bd5882f8d9/ADVS-8-2100774-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/1af2cba4679d/ADVS-8-2100774-g032.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/9582316932f9/ADVS-8-2100774-g029.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/b83682f2469d/ADVS-8-2100774-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/430b74998c0d/ADVS-8-2100774-g024.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f72397626311/ADVS-8-2100774-g035.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/66e0cd0e3f31/ADVS-8-2100774-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/f26841f23e2f/ADVS-8-2100774-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/301c52daf82a/ADVS-8-2100774-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/9bf5a1ff7b38/ADVS-8-2100774-g026.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/6d2e43bf19db/ADVS-8-2100774-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/ddb1eaa7a627/ADVS-8-2100774-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/c6ac7972da58/ADVS-8-2100774-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fe99/8498886/7103bf996d5e/ADVS-8-2100774-g010.jpg

相似文献

1
All-Solid-State Thin Film μ-Batteries for Microelectronics.用于微电子的全固态薄膜微型电池。
Adv Sci (Weinh). 2021 Oct;8(19):e2100774. doi: 10.1002/advs.202100774. Epub 2021 Aug 5.
2
Electrode-Electrolyte Interfaces in Lithium-Sulfur Batteries with Liquid or Inorganic Solid Electrolytes.液体或无机固体电解质的锂硫电池的电极-电解质界面。
Acc Chem Res. 2017 Nov 21;50(11):2653-2660. doi: 10.1021/acs.accounts.7b00460. Epub 2017 Nov 7.
3
Dynamic Electrode-Electrolyte Intermixing in Solid-State Sodium Nano-Batteries.固态钠纳米电池中的动态电极-电解质混合。
ACS Appl Mater Interfaces. 2023 May 24;15(20):24271-24283. doi: 10.1021/acsami.2c23256. Epub 2023 May 11.
4
Monolithic All-Solid-State High-Voltage Li-Metal Thin-Film Rechargeable Battery.单片全固态高压锂金属薄膜可充电电池
ACS Appl Energy Mater. 2022 Oct 24;5(10):12120-12131. doi: 10.1021/acsaem.2c01581. Epub 2022 Sep 27.
5
All-Solid-State Thin Film Lithium/Lithium-Ion Microbatteries for Powering the Internet of Things.用于为物联网供电的全固态薄膜锂/锂离子微型电池。
Adv Mater. 2023 Jan;35(2):e2200538. doi: 10.1002/adma.202200538. Epub 2022 Nov 28.
6
Innovative Approaches to Li-Argyrodite Solid Electrolytes for All-Solid-State Lithium Batteries.用于全固态锂电池的锂-硫银锗矿型固体电解质的创新方法。
Acc Chem Res. 2021 Jun 15;54(12):2717-2728. doi: 10.1021/acs.accounts.0c00874. Epub 2021 May 25.
7
The Li-ion rechargeable battery: a perspective.锂离子可充电电池：一个展望。
J Am Chem Soc. 2013 Jan 30;135(4):1167-76. doi: 10.1021/ja3091438. Epub 2013 Jan 18.
8
Nanostructured electrolytes for stable lithium electrodeposition in secondary batteries.用于二次电池中稳定锂沉积的纳米结构电解质。
Acc Chem Res. 2015 Nov 17;48(11):2947-56. doi: 10.1021/acs.accounts.5b00427. Epub 2015 Oct 23.
9
Elevated-Temperature 3D Printing of Hybrid Solid-State Electrolyte for Li-Ion Batteries.用于锂离子电池的高温 3D 打印混合固态电解质。
Adv Mater. 2018 Sep;30(39):e1800615. doi: 10.1002/adma.201800615. Epub 2018 Aug 21.
10
Research progress of organic liquid electrolyte for sodium ion battery.钠离子电池有机液体电解质的研究进展
Front Chem. 2023 Sep 12;11:1253959. doi: 10.3389/fchem.2023.1253959. eCollection 2023.

引用本文的文献

1
Chemical Compatibility of LiAlTi(PO) Solid-State Electrolyte Co-Sintered with LiTiO Anode for Multilayer Ceramic Lithium Batteries.用于多层陶瓷锂电池的与LiTiO阳极共烧结的LiAlTi(PO)固态电解质的化学兼容性
Materials (Basel). 2025 Feb 15;18(4):851. doi: 10.3390/ma18040851.
2
Vanadium pentoxide interfacial layer enables high performance all-solid-state thin film batteries.五氧化二钒界面层可实现高性能全固态薄膜电池。
RSC Adv. 2024 May 13;14(22):15261-15269. doi: 10.1039/d4ra01849d. eCollection 2024 May 10.
3
A non-academic perspective on the future of lithium-based batteries.

本文引用的文献

1
Preparation of thin solid electrolyte by hot-pressing and diamond wire slicing.通过热压和金刚石线切割制备固体电解质薄膜。
RSC Adv. 2019 Apr 15;9(21):11670-11675. doi: 10.1039/c9ra00711c. eCollection 2019 Apr 12.
2
Is graphite lithiophobic or lithiophilic?石墨是疏锂的还是亲锂的？
Natl Sci Rev. 2020 Jul;7(7):1208-1217. doi: 10.1093/nsr/nwz222. Epub 2020 Jan 3.
3
Physical Vapor Deposition in Solid-State Battery Development: From Materials to Devices.固态电池开发中的物理气相沉积：从材料到器件
从非学术角度展望锂离子电池的未来。
Nat Commun. 2023 Jan 26;14(1):420. doi: 10.1038/s41467-023-35933-2.
4
Control of Ionic Conductivity by Lithium Distribution in Cubic Oxide Argyrodites LiPSiOCl.立方氧化物银辉石 LiPSiOCl 中锂离子分布对离子电导率的控制。
J Am Chem Soc. 2022 Dec 7;144(48):22178-22192. doi: 10.1021/jacs.2c09863. Epub 2022 Nov 22.
5
Enhanced Interfacial Kinetics and High Rate Performance of LiCoO Thin-Film Electrodes by Al Doping and In Situ AlO Coating.通过铝掺杂和原位氧化铝涂层增强LiCoO薄膜电极的界面动力学和高倍率性能
ACS Omega. 2022 Aug 24;7(35):31597-31606. doi: 10.1021/acsomega.2c04665. eCollection 2022 Sep 6.
Adv Sci (Weinh). 2021 Jun;8(11):e2002044. doi: 10.1002/advs.202002044. Epub 2021 Mar 19.
4
Composite Si-Ni nanoparticles produced by plasma spraying physical vapor deposition for negative electrode in Li-ion batteries.通过等离子喷涂物理气相沉积法制备的用于锂离子电池负极的复合硅镍纳米颗粒。
Nanotechnology. 2021 Apr 7;32(26). doi: 10.1088/1361-6528/abef2b.
5
Ensemble Design of Electrode-Electrolyte Interfaces: Toward High-Performance Thin-Film All-Solid-State Li-Metal Batteries.电极-电解质界面的集成设计：迈向高性能薄膜全固态锂金属电池
ACS Nano. 2021 Mar 23;15(3):4561-4575. doi: 10.1021/acsnano.0c08691. Epub 2021 Feb 25.
6
Elucidating Interfacial Stability between Lithium Metal Anode and Li Phosphorus Oxynitride via Electron Microscopy.通过电子显微镜阐明锂金属负极与氮氧化锂磷之间的界面稳定性
Nano Lett. 2021 Jan 13;21(1):151-157. doi: 10.1021/acs.nanolett.0c03438. Epub 2020 Dec 18.
7
Pulsed Laser Deposition-based Thin Film Microbatteries.基于脉冲激光沉积的薄膜微型电池。
Chem Asian J. 2020 Jun 17;15(12):1829-1847. doi: 10.1002/asia.202000384. Epub 2020 May 18.
8
Defect formation and migration in Nasicon LiAlTi(PO).Nasicon 型 LiAlTi(PO)中缺陷的形成与迁移。
Phys Chem Chem Phys. 2019 Nov 21;21(43):24232-24238. doi: 10.1039/c9cp04792a. Epub 2019 Oct 29.
9
Failure Mechanism and Interface Engineering for NASICON-Structured All-Solid-State Lithium Metal Batteries.NASICON 结构全固态锂金属电池的失效机制与界面工程
ACS Appl Mater Interfaces. 2019 Jun 12;11(23):20895-20904. doi: 10.1021/acsami.9b05516. Epub 2019 May 30.
10
Effect of Gallium Substitution on Lithium-Ion Conductivity and Phase Evolution in Sputtered LiGa LaZrO Thin Films.掺镓对溅射 LiGaLaZrO 薄膜中锂离子电导率和相演变的影响。
ACS Appl Mater Interfaces. 2018 Apr 25;10(16):13720-13728. doi: 10.1021/acsami.8b03163. Epub 2018 Apr 12.