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努森泵：综述

Knudsen pumps: a review.

作者信息

Wang Xiaowei, Su Tianyi, Zhang Wenqing, Zhang Zhijun, Zhang Shiwei

机构信息

School of Mechanical Engineering and Automation, Northeastern University, 110819 Shenyang, China.

出版信息

Microsyst Nanoeng. 2020 Jun 15;6:26. doi: 10.1038/s41378-020-0135-5. eCollection 2020.

DOI:10.1038/s41378-020-0135-5
PMID:34567641
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8433228/
Abstract

The Knudsen pump (KP) is a kind of micro-pump that can form thermally induced flows induced by temperature fields in rarefied gas environments. It has the advantages of having no moving parts, simple structure, easy construction and extension, a wide range of energy sources, and low energy consumption. With the development of Micro/Nano Electro Mechanical Systems (MEMS/NEMS), extensive studies have been conducted on KPs, and the applications of KPs have widened. In order to obtain efficient flow fields in KPs, it is necessary to adopt modern computational methods for simulation and analysis. In many circumstances, the simulation and experimental results have good agreement. However, there seems to be no comprehensive review on KPs at present. In this paper, KPs are first defined and classified according to the flow mechanisms of the thermally induced flows. Then, the three aspects of configurations, performance, and applications of KPs in the current state of research are reviewed and analyzed. Finally, the current problems of KP are discussed, and some suggestions are provided for future research and applications.

摘要

克努森泵（KP）是一种微型泵，在稀薄气体环境中，它能够形成由温度场诱导产生的热致流。它具有无运动部件、结构简单、易于构建与扩展、能源范围广以及能耗低等优点。随着微纳机电系统（MEMS/NEMS）的发展，人们对克努森泵展开了广泛研究，其应用范围也不断拓宽。为了在克努森泵中获得高效的流场，有必要采用现代计算方法进行模拟和分析。在许多情况下，模拟结果与实验结果吻合良好。然而，目前似乎尚无对克努森泵的全面综述。本文首先根据热致流的流动机制对克努森泵进行定义和分类。然后，对克努森泵当前研究现状下的结构、性能及应用这三个方面进行综述和分析。最后，讨论了克努森泵目前存在的问题，并为未来的研究及应用提供了一些建议。

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