Melnikova Galina, Kuznetsova Tatyana, Lapitskaya Vasilina, Petrovskaya Agata, Chizhik Sergei, Zykova Anna, Safonov Vladimir, Aizikovich Sergei, Sadyrin Evgeniy, Sun Weifu, Yakovin Stanislav
Laboratory of Nanoprocesses and Technologies, A.V. Luikov Heat and Mass Transfer Institute of the National Academy of Sciences of Belarus, 15 P. Brovki Str., 220072 Minsk, Belarus.
National Science Center "Kharkov Institute of Physics and Technology", 1 Akademicheskaya Str., 61108 Kharkov, Ukraine.
Nanomaterials (Basel). 2021 Sep 15;11(9):2407. doi: 10.3390/nano11092407.
The present paper addresses the problem of identification of microstructural, nanomechanical, and tribological properties of thin films of tantalum (Ta) and its compounds deposited on stainless steel substrates by direct current magnetron sputtering. The compositions of the obtained nanostructured films were determined by energy dispersive spectroscopy. Surface morphology was investigated using atomic force microscopy (AFM). The coatings were found to be homogeneous and have low roughness values (<10 nm). The values of microhardness and elastic modulus were obtained by means of nanoindentation. Elastic modulus values for all the coatings remained unchanged with different atomic percentage of tantalum in the films. The values of microhardness of the tantalum films were increased after incorporation of the oxygen and nitrogen atoms into the crystal lattice of the coatings. The coefficient of friction, CoF, was determined by the AFM method in the "sliding" and "plowing" modes. Deposition of the coatings on the substrates led to a decrease of CoF for the coating-substrate system compared to the substrates; thus, the final product utilizing such a coating will presumably have a longer service life. The tantalum nitride films were characterized by the smallest values of CoF and specific volumetric wear.
本文探讨了通过直流磁控溅射沉积在不锈钢基底上的钽(Ta)及其化合物薄膜的微观结构、纳米力学和摩擦学性能的识别问题。通过能量色散光谱法确定了所得纳米结构薄膜的成分。使用原子力显微镜(AFM)研究了表面形貌。发现涂层均匀且粗糙度值低(<10 nm)。通过纳米压痕获得了显微硬度和弹性模量的值。所有涂层的弹性模量值在薄膜中钽的原子百分比不同时保持不变。在涂层的晶格中掺入氧和氮原子后,钽薄膜的显微硬度值增加。通过AFM方法在“滑动”和“犁削 ”模式下测定摩擦系数(CoF)。与基底相比,在基底上沉积涂层导致涂层 - 基底系统的CoF降低;因此,使用这种涂层的最终产品可能具有更长的使用寿命。氮化钽薄膜的特点是CoF值和比体积磨损最小。