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在平面蓝宝石衬底上采用金纳米颗粒-绝缘体-金属夹心层提高表面增强拉曼散射的灵敏度

Improved Sensitivity of Surface-Enhanced Raman Scattering with Gold Nanoparticles-Insulator-Metal Sandwich Layers on Flat Sapphire Substrate.

作者信息

Li Wenbing, Tong Xin, Yang Zhuo, Zhang Jiali, Liu Bo, Chen Chao Ping

机构信息

Shanghai Industrial μTechnology Research Institute, Shanghai 201800, China.

School of Microelectronics, Shanghai University, Shanghai 201899, China.

出版信息

Nanomaterials (Basel). 2021 Sep 16;11(9):2416. doi: 10.3390/nano11092416.

Abstract

Surface-enhanced Raman scattering (SERS) as a high sensitivity analytical method for molecule detection has attracted much attention in recent research. In this work, we demonstrated an improved SERS substrate, which has the gold nanoparticles randomly distributed on a SiO interception layer over a gold thin film layer on the flat sapphire substrate (AuNP/SiO/Au/Sapphire), over the dispersed gold nanoparticles on a silicon substrate (AuNP/Si), for detection of R6G (1 × 10 M) in a Raman microscope. The fabrication of sandwich layers on top of the sapphire substrate involves evaporation of a gold mirror as thick as 100 nm, plasma enhanced chemical vapor deposition of the silica insulator layer 10 nm thick, and evaporation of a thin gold layer 10 nm thick for forming gold nanoparticles. For comparison, a gold thin film with a thickness of 5 nm and 10 nm was evaporated on a silicon substrate, respectively (AuNP/Si), as the reference SERS substrates in the experiment. The AuNP/SiO/Au/Sapphire substrate demonstrated improved sensitivity in detection of molecules in Raman microscopy, which can enable the molecules to be recognizable at a low laser power as 8.5 × 10 mW, 0.017 mW, 0.085 mW, and 0.17 mW for ultrashort exposure time. The simulation of AuNP/SiO/Au/Sapphire substrate and AuNP/Si substrate, based on the finite-difference time-domain (FDTD) method, explained the improved sensitivity for detection of R6G molecules from the view of classical electromagnetics, and it suggested the optimized size for the gold nanoparticles and the optimized laser wavelength for Raman microscopy for further research.

摘要

表面增强拉曼散射(SERS)作为一种用于分子检测的高灵敏度分析方法,在最近的研究中备受关注。在这项工作中,我们展示了一种改进的SERS基底,其具有随机分布在平面蓝宝石基底上的金薄膜层上方的SiO拦截层上的金纳米颗粒(AuNP/SiO/Au/蓝宝石),优于硅基底上分散的金纳米颗粒(AuNP/Si),用于在拉曼显微镜中检测R6G(1×10⁻⁶ M)。在蓝宝石基底顶部制备夹心层包括蒸发厚度为100 nm的金镜、等离子体增强化学气相沉积10 nm厚的二氧化硅绝缘层以及蒸发10 nm厚的薄金层以形成金纳米颗粒。为了进行比较,分别在硅基底上蒸发厚度为5 nm和10 nm的金薄膜(AuNP/Si),作为实验中的参考SERS基底。AuNP/SiO/Au/蓝宝石基底在拉曼显微镜中检测分子时表现出更高的灵敏度,这使得分子在8.5×10⁻⁵ mW、0.017 mW、0.085 mW和0.17 mW的低激光功率下,经过超短曝光时间即可被识别。基于时域有限差分(FDTD)方法对AuNP/SiO/Au/蓝宝石基底和AuNP/Si基底的模拟,从经典电磁学的角度解释了检测R6G分子时灵敏度提高的原因,并为进一步研究提出了金纳米颗粒的优化尺寸和拉曼显微镜的优化激光波长。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/20a5/8468857/088cc6c78441/nanomaterials-11-02416-g001.jpg

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