基于高精细度单片弯曲穹顶微腔的压力传感

Pressure sensing with high-finesse monolithic buckled-dome microcavities.

作者信息

Al-Sumaidae S, Bu L, Hornig G J, Bitarafan M H, DeCorby R G

出版信息

Appl Opt. 2021 Oct 10;60(29):9219-9224. doi: 10.1364/AO.438942.

Abstract

We describe the use of on-chip buckled-dome Fabry-Perot microcavities as pressure sensing elements. These cavities, fabricated by a controlled thin-film buckling process, are inherently sealed and support stable optical modes (finesse >10), which are well-suited to coupling by single-mode fibers. Changes in external pressure deflect the buckled upper mirror, leading to changes in resonance wavelengths. Experimental shifts are shown to be in good agreement with theoretical predictions. Sensitivities as large as ∼1/, attributable to the low thickness (<2µ) of the buckled mirror, and resolution ∼10 are demonstrated. We discuss potential advantages over traditional low-finesse, quasi-planar Fabry-Perot pressure sensors.

摘要

我们描述了将片上弯曲穹顶法布里 - 珀罗微腔用作压力传感元件的情况。这些微腔通过可控的薄膜屈曲工艺制造，本质上是密封的，并支持稳定的光学模式（精细度>10），非常适合通过单模光纤进行耦合。外部压力的变化会使弯曲的上镜偏转，从而导致共振波长发生变化。实验结果表明，实验位移与理论预测吻合良好。由于弯曲镜的厚度低（<2µ），灵敏度高达约1/，分辨率约为10。我们讨论了与传统低精细度、准平面法布里 - 珀罗压力传感器相比的潜在优势。