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用于极端环境应用的温度和压力无线陶瓷传感器（距离 = 0.5 米）

Temperature and Pressure Wireless Ceramic Sensor (Distance = 0.5 Meter) for Extreme Environment Applications.

作者信息

Daniel Justin, Nguyen Spencer, Chowdhury Md Atiqur Rahman, Xu Shaofan, Xu Chengying

机构信息

Department of Mechanical Engineering, Florida State University, Tallahassee, FL 32306, USA.

Mechanical and Aerospace Engineering Department, North Carolina State University, Raleigh, NC 27695, USA.

出版信息

Sensors (Basel). 2021 Oct 6;21(19):6648. doi: 10.3390/s21196648.

DOI:10.3390/s21196648
PMID:34640968
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8512561/
Abstract

This paper presents a design for temperature and pressure wireless sensors made of polymer-derived ceramics for extreme environment applications. The wireless sensors were designed and fabricated with conductive carbon paste on an 18.24 mm diameter with 2.4 mm thickness polymer-derived ceramic silicon carbon nitride (PDC-SiCN) disk substrate for the temperature sensor and an 18 × 18 × 2.6 mm silicon carbide ceramic substrate for the pressure sensor. In the experiment, a horn antenna interrogated the patch antenna sensor on a standard muffle furnace and a Shimadzu AGS-J universal test machine (UTM) at a wireless sensing distance of 0.5 m. The monotonic relationship between the dielectric constant of the ceramic substrate and ambient temperature is the fundamental principle for wireless temperature sensing. The temperature measurement has been demonstrated from 600 °C to 900 °C. The result closely matches the thermocouple measurement with a mean absolute difference of 2.63 °C. For the pressure sensor, the patch antenna was designed to resonate at 4.7 GHz at the no-loading case. The sensing mechanism is based on the piezo-dielectric property of the silicon carbon nitride. The developed temperature/pressure sensing system provides a feasible solution for wireless measurement for extreme environment applications.

摘要

本文介绍了一种用于极端环境应用的由聚合物衍生陶瓷制成的温度和压力无线传感器的设计。这些无线传感器是在直径18.24毫米、厚度2.4毫米的聚合物衍生陶瓷碳化硅氮化物（PDC-SiCN）圆盘基板上用导电碳糊设计并制造的用于温度传感器，以及在18×18×2.6毫米的碳化硅陶瓷基板上用于压力传感器。在实验中，一个喇叭天线在标准马弗炉和岛津AGS-J万能试验机（UTM）上以0.5米的无线传感距离对贴片天线传感器进行询问。陶瓷基板的介电常数与环境温度之间的单调关系是无线温度传感的基本原理。温度测量范围已证明为600℃至900℃。结果与热电偶测量结果紧密匹配，平均绝对差为2.63℃。对于压力传感器，贴片天线设计为在空载情况下在4.7吉赫兹处谐振。传感机制基于碳化硅氮化物的压电特性。所开发的温度/压力传感系统为极端环境应用的无线测量提供了一种可行的解决方案。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/a423a930fa56/sensors-21-06648-g015.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/147b7b802555/sensors-21-06648-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/1d8c180fbbd1/sensors-21-06648-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/a97c2a8b685b/sensors-21-06648-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/20ae894e6146/sensors-21-06648-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/6d184478ba9d/sensors-21-06648-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/21bc8e5fce6f/sensors-21-06648-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/49bcf47d79da/sensors-21-06648-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/7f1b9fb5322a/sensors-21-06648-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/47d8933f7451/sensors-21-06648-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/1e33f8c05439/sensors-21-06648-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/3b8e1ff216a1/sensors-21-06648-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/147b7b802555/sensors-21-06648-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/1d8c180fbbd1/sensors-21-06648-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/a97c2a8b685b/sensors-21-06648-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/20ae894e6146/sensors-21-06648-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/6d184478ba9d/sensors-21-06648-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/21bc8e5fce6f/sensors-21-06648-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/430e2fc6b4ec/sensors-21-06648-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1dfc/8512561/a423a930fa56/sensors-21-06648-g015.jpg

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