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基于磁控溅射法制备的织物基底新型银温度传感器的研究

Research of a Novel Ag Temperature Sensor Based on Fabric Substrate Fabricated by Magnetron Sputtering.

作者信息

Yan Zong-Yao, Liu Jian-Yong, Niu Jia-Rong

机构信息

School of Textile Science and Engineering, Tiangong University, Tianjin 300387, China.

Key Laboratory of Advanced Textile Composites Ministry of Education, Tiangong University, Tianjin 300387, China.

出版信息

Materials (Basel). 2021 Oct 12;14(20):6014. doi: 10.3390/ma14206014.

DOI:10.3390/ma14206014
PMID:34683606
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8540354/
Abstract

TPU-coated polyester fabric was used as the substrate of a flexible temperature sensor and Ag nanoparticles were deposited on its surface as the temperature sensing layer by the magnetron sputtering method. The effects of sputtering powers and heat treatment on properties of the sensing layers, such as the temperature coefficient of resistance (TCR), linearity, hysteresis, drift, reliability, and bending resistance, were mainly studied. The results showed that the TCR (0.00234 °C) was the highest when sputtering power was 90 W and sputtering pressure was 0.8 Pa. The crystallinity of Ag particles would improve, as the TCR was improved to 0.00262 °C under heat treatment condition at 160°. The Ag layer obtained excellent linearity, lower hysteresis and drift value, as well as good reliability and bending resistance when the sputtering power was 90 W. The flexible temperature sensor based on the coated polyester fabric improved the softness and comfortableness of sensor, which can be further applied in intelligent wearable products.

摘要

聚对苯二甲酸乙二酯（TPU）涂层聚酯织物用作柔性温度传感器的基底，通过磁控溅射法在其表面沉积银纳米颗粒作为温度传感层。主要研究了溅射功率和热处理对传感层性能的影响，如电阻温度系数（TCR）、线性度、滞后、漂移、可靠性和抗弯曲性。结果表明，当溅射功率为90 W、溅射压力为0.8 Pa时，TCR（0.00234 °C）最高。在160°的热处理条件下，随着TCR提高到0.00262 °C，银颗粒的结晶度会提高。当溅射功率为90 W时，银层具有优异的线性度、较低的滞后和漂移值，以及良好的可靠性和抗弯曲性。基于涂层聚酯织物的柔性温度传感器提高了传感器的柔软性和舒适性，可进一步应用于智能可穿戴产品。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/643b021c971c/materials-14-06014-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/3b151004f1ca/materials-14-06014-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/2cc2bf072b6a/materials-14-06014-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/657c0e85f9ea/materials-14-06014-g003a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/0526872e1934/materials-14-06014-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/3e869c67d413/materials-14-06014-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/f25333b58845/materials-14-06014-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/3412953df75e/materials-14-06014-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/5ab2ff32cdd2/materials-14-06014-g008a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/bd4e201d4b4c/materials-14-06014-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/643b021c971c/materials-14-06014-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/3b151004f1ca/materials-14-06014-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/2cc2bf072b6a/materials-14-06014-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/657c0e85f9ea/materials-14-06014-g003a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/0526872e1934/materials-14-06014-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/3e869c67d413/materials-14-06014-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/f25333b58845/materials-14-06014-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/3412953df75e/materials-14-06014-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/5ab2ff32cdd2/materials-14-06014-g008a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/bd4e201d4b4c/materials-14-06014-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b88/8540354/643b021c971c/materials-14-06014-g010.jpg

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