Liu Zhaojun, Tian Bian, Zhang Bingfei, Liu Jiangjiang, Zhang Zhongkai, Wang Song, Luo Yunyun, Zhao Libo, Shi Peng, Lin Qijing, Jiang Zhuangde
State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, 710049 Xi'an, China.
Microsyst Nanoeng. 2021 Jun 1;7:42. doi: 10.1038/s41378-021-00271-0. eCollection 2021.
Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.
精确的温度测量能够有效解决众多关键问题并提供关键信息。在此，一种通过微纳加工工艺设计并制造的柔性微三维传感器，它将铂和氧化铟结合形成热电偶，以实现原位实时温度测量。通过优化工艺参数、结构设计和制备方法，该传感器的稳定性和可靠性得到了极大提高。设计了一种具有更好延展性的新型微三维结构，它还利用了二维薄膜的快速响应特性。所获得的具有优异稳定性和可靠性的柔性温度传感器有望极大地推动包括生物机器人和医疗保健系统在内的各种新兴研究领域中关键部件的发展。进一步提出并设计了该应用传感器在口罩中的模型，以实现健康信息的收集，减少因患者未及时检测和治疗而导致的死亡人数。
