Liu Zhaojun, Tian Bian, Fan Xu, Zhang Zhongkai, Liu Jiangjiang, Lin Qijing, Shi Peng, Han Feng, Mao Qi, Jiang Zhuangde
State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Rev Sci Instrum. 2020 Dec 1;91(12):125004. doi: 10.1063/5.0023011.
In the paper, the flexible temperature sensor based on polyimide is designed and fabricated by magnetron sputtering technology. The impact of vacuum degree, sputtering power, and argon flow rate on the roughness and deposition rate of two thermo-electrodes [indium tin oxide (ITO)/indium oxide (InO)] is investigated with orthogonal experiment. The thermoelectric properties of the sensor are greatly improved by low temperature heat treatment. The sensitivity of the ITO film and InO film increases by 2.61 times and 2.89 times, respectively, after 1 h low-temperature heat treatment. According to the comprehensive evaluation, an innovative step annealing process is proposed to optimize the heat treatment of the prepared thermo-electrodes. The fabricated flexible thin film thermocouples exhibit great operating characteristics in the low temperature measurement range. When the hot end's temperature reaches 181.5 °C, the thermoelectric force can reach 7.84 mV and the average Seebeck coefficient can reach 50.55 µV/°C. The repeatability and hysteresis error of the sensor is ±0.88% and 1.90%, respectively. The sensor in this work shows great application potential for in situ real-time temperature measurement in robotic dexterous hands, electronic skin, and foldable devices.
本文采用磁控溅射技术设计并制备了基于聚酰亚胺的柔性温度传感器。通过正交实验研究了真空度、溅射功率和氩气流量对两个热电极[氧化铟锡（ITO）/氧化铟（InO）]粗糙度和沉积速率的影响。通过低温热处理，传感器的热电性能得到了极大改善。经过1小时低温热处理后，ITO薄膜和InO薄膜的灵敏度分别提高了2.61倍和2.89倍。根据综合评估，提出了一种创新的分步退火工艺来优化制备的热电极的热处理。所制备的柔性薄膜热电偶在低温测量范围内表现出优异的工作特性。当热端温度达到181.5°C时，热电动势可达7.84 mV，平均塞贝克系数可达50.55 µV/°C。传感器的重复性和滞后误差分别为±0.88%和1.90%。本文中的传感器在机器人灵巧手、电子皮肤和可折叠设备的原位实时温度测量方面具有巨大的应用潜力。
