Kononov Evgenii Aleksandrovich, Vasiliev Mikhail Mikhailovich, Vasilieva Elena Valeryevna, Petrov Oleg Fedorovich
Joint Institute for High Temperatures of the Russian Academy of Sciences, Izhorskaya st. 13 Bldg. 2, 125412 Moscow, Russia.
Moscow Institute of Physics and Technology, Institutskiy Pereulok 9, 141701 Dolgoprudny, Russia.
Nanomaterials (Basel). 2021 Nov 2;11(11):2931. doi: 10.3390/nano11112931.
The results of a study on particles' surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chamber after switching the RF discharge on. For melamine-formaldehyde (MF) particles, the appearance of an island metal coating is observed after 30 min of plasma exposure. Eroded electrodes and elements of the gas discharge chamber may serve as a source of deposited material. In addition, an analysis of the surface and composition of particles placed on the upper electrode after 6 h of plasma exposure is presented. We reveal that the composition and structure of the particle coating changes during the experiment. The MF particles under exposure become eroded, and needle-like structures containing metals are formed on their surface. We also observe the formation of columnar structures from the products of erosion of electrodes on particles with a metal coating.
本文展示了对暴露于射频（RF）放电近电极区域后的颗粒表面的研究结果。实验表明，开启射频放电后，金属开始沉积在位于放电室下部电极上方悬浮的颗粒表面。对于三聚氰胺 - 甲醛（MF）颗粒，等离子体暴露30分钟后观察到岛状金属涂层的出现。被侵蚀的电极和气体放电室的元件可能是沉积材料的来源。此外，还对等离子体暴露6小时后置于上部电极上的颗粒的表面和成分进行了分析。我们发现颗粒涂层的成分和结构在实验过程中发生了变化。暴露中的MF颗粒被侵蚀，其表面形成了含有金属的针状结构。我们还观察到在有金属涂层的颗粒上，电极侵蚀产物形成了柱状结构。
