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通过皮秒激光超声与X射线衍射、能量色散光谱、电子探针微分析、扫描电子显微镜和原子力显微镜相结合对BaSrTiO薄膜材料库的光学和声学性质进行评估。

Evaluation of Optical and Acoustical Properties of BaSrTiO Thin Film Material Library via Conjugation of Picosecond Laser Ultrasonics with X-ray Diffraction, Energy Dispersive Spectroscopy, Electron Probe Micro Analysis, Scanning Electron and Atomic Force Microscopies.

作者信息

Sandeep Sathyan, Raetz Samuel, Wolfman Jerome, Negulescu Beatrice, Liu Guozhen, Longuet Jean-Louis, Thréard Théo, Gusev Vitalyi E

机构信息

Laboratoire d'Acoustique de l'Université du Mans (LAUM), UMR 6613, Institut d'Acoustique-Graduate School (IA-GS), CNRS, Le Mans Université, 72085 Le Mans, France.

Laboratoire GREMAN, UMR CNRS 7347, Université de Tours, INSA CVL, Parc de Grandmont, 37200 Tours, France.

出版信息

Nanomaterials (Basel). 2021 Nov 20;11(11):3131. doi: 10.3390/nano11113131.

Abstract

Wide-range continuous spatial variation of the film composition in lateral compositionally graded epitaxial films requires the development of high throughput measurement techniques for their local and non-destructive characterization with the highest possible spatial resolution. Here we report on the first application of the picosecond laser ultrasonics (PLU) technique for the evaluation of acoustical and optical parameters of lateral compositionally graded film, the BaSrTiO (0 ≤ x ≤ 1) material library. The film was not dedicatedly prepared for its opto-acousto-optic evaluation by PLU, exhibiting significant lateral variations in thickness and surface roughness. Therefore, the achieved measurements of the sound velocity and of the optical refractive index, and characterization of the surface roughness confirm the robustness of the PLU technique for thin film evaluation. We hope that the first measurements of the acoustical and optical properties of epitaxial grown BaSrTiO (0 ≤ x ≤ 1) by PLU technique accomplished here provide the parameters required for more extended predictive design of the phononic, photonic and phoxonic mirrors and cavities with superior properties/functionalities for novel multifunctional nanodevices.

摘要

横向成分渐变外延薄膜中薄膜成分的大范围连续空间变化,需要开发高通量测量技术,以便在尽可能高的空间分辨率下对其进行局部和无损表征。在此,我们报告了皮秒激光超声(PLU)技术首次应用于评估横向成分渐变薄膜(BaSrTiO,0 ≤ x ≤ 1材料库)的声学和光学参数。该薄膜并非专门为通过PLU进行光声光学评估而制备,其厚度和表面粗糙度存在显著的横向变化。因此,所实现的声速和光学折射率测量以及表面粗糙度表征证实了PLU技术用于薄膜评估的稳健性。我们希望在此通过PLU技术完成的外延生长BaSrTiO(0 ≤ x ≤ 1)声学和光学性质的首次测量,能为具有卓越性能/功能的新型多功能纳米器件的声子、光子和光声子镜及腔的更广泛预测设计提供所需参数。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ff4c/8622591/dee5679e0109/nanomaterials-11-03131-g001.jpg

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