Goossens Thomas
Opt Lett. 2021 Dec 1;46(23):5926-5929. doi: 10.1364/OL.442737.
Thin-film all-dielectric Fabry-Perot filters can nowadays be patterned onto pixels of commercial imaging sensors used for spectral imaging. For these patterned filters, standard transfer-matrix thin-film calculations fail to predict their angular dependency. This Letter attributes the discrepancy to the finite filter size and is also, to my knowledge, the first study to analyze this for patterned all-dielectric Fabry-Perot filters. An angular spectrum approach that enables prediction without full knowledge of the filter design is introduced. In addition, the contribution of diffraction at normal incidence is characterized by a single dimensionless parameter. Knowing that patterned filter size matters and having a method to efficiently simulate its effect can guide ongoing miniaturization efforts and filter design.
如今，薄膜全介质法布里-珀罗滤波器可以被制作在用于光谱成像的商业成像传感器的像素上。对于这些制作了图案的滤波器，标准的传输矩阵薄膜计算无法预测它们的角度依赖性。据我所知，本信函将这种差异归因于滤波器的有限尺寸，并且也是首次针对制作了图案的全介质法布里-珀罗滤波器进行此类分析的研究。本文介绍了一种角度谱方法，该方法无需完全了解滤波器设计就能进行预测。此外，垂直入射时的衍射贡献由一个单一的无量纲参数来表征。了解到制作了图案的滤波器尺寸很重要并且有方法能有效模拟其效果，可以指导正在进行的小型化工作和滤波器设计。
