Frey Laurent, Masarotto Lilian, Armand Marilyn, Charles Marie-Lyne, Lartigue Olivier
Opt Express. 2015 May 4;23(9):11799-812. doi: 10.1364/OE.23.011799.
Thin film Fabry-Perot filter arrays with high selectivity can be realized with a single patterning step, generating a spatial modulation of the effective refractive index in the optical cavity. In this paper, we investigate the ability of this technology to address two applications in the field of image sensors. First, the spectral tuning may be used to compensate the blue-shift of the filters in oblique incidence, provided the filter array is located in an image plane of an optical system with higher field of view than aperture angle. The technique is analyzed for various types of filters and experimental evidence is shown with copper-dielectric infrared filters. Then, we propose a design of a multispectral filter array with an extended spectral range spanning the visible and near-infrared range, using a single set of materials and realizable on a single substrate.
具有高选择性的薄膜法布里 - 珀罗滤波器阵列可以通过单个图案化步骤实现，从而在光学腔中产生有效折射率的空间调制。在本文中，我们研究了该技术在图像传感器领域解决两种应用的能力。首先，如果滤波器阵列位于视场比孔径角大的光学系统的像平面中，则光谱调谐可用于补偿倾斜入射时滤波器的蓝移。针对各种类型的滤波器对该技术进行了分析，并给出了铜 - 电介质红外滤波器的实验证据。然后，我们提出了一种多光谱滤波器阵列的设计，该阵列使用单一材料集，具有跨越可见光和近红外范围的扩展光谱范围，并且可以在单个基板上实现。
