Stolz Christopher J, Sytchkova Anna, Doerner Paul, Kupinski Pete, Feigenbaum Eyal, Teslich Nick, Menor Marlon, Adams John
Opt Express. 2021 Jul 19;29(15):24032-24044. doi: 10.1364/OE.426570.
Laser-induced damage threshold of transparent conductors, such as Indium Tin Oxide (ITO), is limited by their high optical absorption due to free carriers. However, the effective absorption of a transparent conductor thin film can be reduced by an order of magnitude, without changing the electrical characteristics of the film, when placed in a low electric field section of a multilayer coating. A Fabry-Perot thin film interference filter has both high transmittance and low electric field positions, so it is an ideal thin film structure for this application. Although Fabry-Perot interference filters are not known as particularly high laser-induced damage resistant coatings due to their resonant characteristics, a laser-induced damage threshold (LIDT) improvement of up to 8× was observed with this technique compared to single layer ITO coatings fabricated using either radio frequency magnetron sputtering or electron-beam deposition. Additionally, an approximately 4× LIDT improvement for a Fabry-Perot interference filter has been observed by the addition of ITO into the multilayer structure.
诸如氧化铟锡（ITO）之类的透明导体的激光诱导损伤阈值，因其自由载流子导致的高光学吸收而受到限制。然而，当置于多层涂层的低电场区域时，透明导体薄膜的有效吸收可降低一个数量级，且不改变薄膜的电学特性。法布里 - 珀罗薄膜干涉滤光片具有高透射率和低电场位置，因此是适用于此应用的理想薄膜结构。尽管由于其谐振特性，法布里 - 珀罗干涉滤光片并非以特别高的抗激光损伤涂层而闻名，但与使用射频磁控溅射或电子束沉积制备的单层ITO涂层相比，采用该技术观察到激光诱导损伤阈值（LIDT）提高了高达8倍。此外，通过在多层结构中添加ITO，观察到法布里 - 珀罗干涉滤光片的LIDT提高了约4倍。
