Chen Jiaxiao, Lu Qianbo, Bai Jian, Xu Xiang, Yao Yuan, Fang Weidong
State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China.
Frontiers Science Center for Flexible Electronics (FSCFE), MIIT Key Laboratory of Flexible Electronics (KLoFE), Shaanxi Key Laboratory of Flexible Electronics (KLoFE), Institute of Flexible Electronics (IFE), Ningbo Institute of Northwestern Polytechnical University, Northwestern Polytechnical University, Xi'an 710072, China.
Micromachines (Basel). 2021 Dec 4;12(12):1511. doi: 10.3390/mi12121511.
External temperature changes can detrimentally affect the properties of a microaccelerometer, especially for high-precision accelerometers. Temperature control is the fundamental method to reduce the thermal effect on microaccelerometer chips, although high-performance control has remained elusive using the conventional proportional-integral-derivative (PID) control method. This paper proposes a modified approach based on a genetic algorithm and fuzzy PID, which yields a profound improvement compared with the typical PID method. A sandwiched microaccelerometer chip with a measurement resistor and a heating resistor on the substrate serves as the hardware object, and the transfer function is identified by a self-built measurement system. The initial parameters of the modified PID are obtained through the genetic algorithm, whereas a fuzzy strategy is implemented to enable real-time adjustment. According to the simulation results, the proposed temperature control method has the advantages of a fast response, short settling time, small overshoot, small steady-state error, and strong robustness. It outperforms the normal PID method and previously reported counterparts. This design method as well as the approach can be of practical use and applied to chip-level package structures.
外部温度变化会对微加速度计的性能产生不利影响，尤其是对于高精度加速度计而言。温度控制是减少热效应影响微加速度计芯片的基本方法，不过，使用传统的比例积分微分（PID）控制方法，高性能控制一直难以实现。本文提出了一种基于遗传算法和模糊PID的改进方法，与典型的PID方法相比有显著改进。以在衬底上带有测量电阻和加热电阻的夹层式微加速度计芯片作为硬件对象，并通过自建测量系统确定传递函数。改进后的PID初始参数通过遗传算法获得，同时实施模糊策略以实现实时调整。根据仿真结果，所提出的温度控制方法具有响应速度快, 调节时间短、超调量小、稳态误差小、鲁棒性强等优点。它优于常规PID方法以及先前报道的同类方法。这种设计方法及途径具有实际应用价值，可应用于芯片级封装结构。
