Weng You-Chen, Lin Yueh-Chin, Hsu Heng-Tung, Kao Min-Lu, Huang Hsuan-Yao, Ueda Daisuke, Ha Minh-Thien-Huu, Yang Chih-Yi, Maa Jer-Shen, Chang Edward-Yi, Dee Chang-Fu
College of Photonics, National Yang Ming Chiao Tung University, Tainan 71150, Taiwan.
Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.
Materials (Basel). 2022 Jan 18;15(3):703. doi: 10.3390/ma15030703.
An AlGaN/GaN/Si high electron mobility transistor (HEMT) using a GaN:C buffer with a 2 nm AlGaN electron-blocking layer (EBL) is investigated for the first time for millimeter-wave applications. Compared with the double heterostructure field effect transistor (DHFET), the AlGaN/GaN HEMT with the GaN:C/EBL buffer has a lower vertical leakage, higher thermal stability, and better RF performance. In addition, AlGaN EBL can prevent carbon-related traps from GaN:C and improve electron confinement in 2DEG during high-frequency operation. Finally, a P of 31.2 dBm with PAE of 21.7% were measured at 28 GHz at 28 V. These results demonstrated the great potential of HEMTs using GaN:C with AlGaN EBL epitaxy technology for millimeter-wave applications.
首次研究了一种用于毫米波应用的采用具有2纳米AlGaN电子阻挡层(EBL)的GaN:C缓冲层的AlGaN/GaN/Si高电子迁移率晶体管(HEMT)。与双异质结构场效应晶体管(DHFET)相比,具有GaN:C/EBL缓冲层的AlGaN/GaN HEMT具有更低的垂直泄漏、更高的热稳定性和更好的射频性能。此外,AlGaN EBL可以防止来自GaN:C的碳相关陷阱,并在高频操作期间改善二维电子气(2DEG)中的电子限制。最后,在28伏、28吉赫兹下测得功率附加效率(PAE)为21.7%时功率为31.2分贝毫瓦。这些结果证明了采用具有AlGaN EBL外延技术的GaN:C的HEMT在毫米波应用方面的巨大潜力。