Fan Qianyang, Liu Hanxi, Jia Xinli, Yan Lianghong, Jiang Bo
College of Chemistry, Sichuan University, Chengdu 610064, China.
Research Center of Laser Fusion, China Academy of Engineering Physical, Mianyang 621900, China.
Materials (Basel). 2022 Jan 25;15(3):912. doi: 10.3390/ma15030912.
In this article, ammonia and methyltriethoxysilane (MTES) were chosen as vapor phase modifiers for the base-catalyzed SiO film. The surface of the film became more dense because of the hydroxyl condensation under the catalyst of ammonia, while the introduction of methyl groups by MTES of vapor treatment hindered the condensation to avoid over-change in film thickness. The hydrophobic of film was improved while the surface roughness of the film increased after treatment. The treated double-layer broadband anti-reflection (AR) coating retains high optical properties with the transmittance of 99.61%, 98.85%, and 99.16% at 355 nm, 532 nm, and 1064 nm, respectively. After exposing to the high humidity condition for 30 days, the broadband AR coating after treatment shows good optical durability, and the transmittance at 355 nm only drops by 0.12%. This vapor surface treatment can find potential application in high-power laser systems and solar cells.
在本文中，氨和甲基三乙氧基硅烷（MTES）被选为碱催化SiO薄膜的气相改性剂。由于在氨的催化下羟基发生缩合，薄膜表面变得更加致密，而通过气相处理的MTES引入甲基则阻碍了缩合，以避免薄膜厚度发生过度变化。处理后薄膜的疏水性得到改善，同时表面粗糙度增加。处理后的双层宽带抗反射（AR）涂层保持了高光学性能，在355nm、532nm和1064nm处的透过率分别为99.61%、98.85%和99.16%。在高湿度条件下暴露30天后，处理后的宽带AR涂层显示出良好的光学耐久性，355nm处的透过率仅下降0.12%。这种气相表面处理在高功率激光系统和太阳能电池中具有潜在的应用价值。
