State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 610054, China.
Department of Bioengineering, University of California, Los Angeles, CA, 90095, USA.
Small Methods. 2022 Feb;6(2):e2101051. doi: 10.1002/smtd.202101051. Epub 2021 Nov 25.
Electrode microfabrication technologies such as lithography and deposition have been widely applied in wearable electronics to boost interfacial coupling efficiency and device performance. However, a majority of these approaches are restricted by expensive and complicated processing techniques, as well as waste discharge. Here, helium plasma irradiation is employed to yield a molybdenum microstructured electrode, which is constructed into a flexible piezoresistive pressure sensor based on a Ti C T nanosheet-immersed polyurethane sponge. This electrode engineering strategy enables the smooth transition between sponge deformation and MXene interlamellar displacement, giving rise to high sensitivity (1.52 kPa ) and good linearity (r = 0.9985) in a wide sensing range (0-100 kPa) with a response time of 226 ms for pressure detection. In addition, both the experimental characterization and finite element simulation confirm that the hierarchical structures modulated by pore size, plasma bias, and MXene concentration play a crucial role in improving the sensing performance. Furthermore, the as-developed flexible pressure sensor is demonstrated to measure human radial pulse, detect finger tapping, foot stomping, and perform object identification, revealing great feasibility in wearable biomonitoring and health assessment.
电极微制造技术，如光刻和沉积，已广泛应用于可穿戴电子设备中，以提高界面耦合效率和器件性能。然而，这些方法中的大多数受到昂贵和复杂的处理技术以及废物排放的限制。在这里，氦等离子体辐照用于产生钼微结构电极，该电极构建成基于 TiC T 纳米片浸渍聚氨酯海绵的柔性压阻压力传感器。这种电极工程策略实现了海绵变形和 MXene 层间位移之间的平稳过渡，在 0-100 kPa 的宽传感范围内具有高灵敏度（1.52 kPa）和良好的线性度（r = 0.9985），压力检测的响应时间为 226 ms。此外，实验表征和有限元模拟都证实，由孔径、等离子体偏置和 MXene 浓度调制的分层结构对提高传感性能起着至关重要的作用。此外，所开发的柔性压力传感器可用于测量人体桡动脉脉搏、检测手指敲击、脚部踩踏和进行物体识别，这表明其在可穿戴生物监测和健康评估方面具有很大的可行性。
